Kabushiki Kaisha Yaskawa Denki

Kyushu Institute of Technology

Toshiyuki Kono

Toru Shikayama

Masanobu Kakihara

Shuichi Enokida

Yoshiaki Kubota

Tomoyuki Horiuchi

Akihito Toyota

Youichi Motomura

Hisashi Ideguchi

Mitsunori Nagao

Toshiaki Ejima

Masakazu Sadano

In an object detecting method according to an embodiment, external reference points are set in external space of a model of an object and an internal reference point is set in internal space of the model. A table is stored in which feature quantities on a local surface of the model are associated with positions of the external reference points and the internal reference point. The feature quantity on the local surface of the model is calculated, and the position of the reference point whose feature quantity is identical to the calculated feature quantity is acquired from the table and is converted into a position in a real space. When the converted position is outside the object, the position is excluded from information for estimation and the position and the attitude of the object are estimated.

Device and method to detect an object and controlling a device to pick up the detected object

This stage apparatus includes a movable table to hold a sample, a levitation unit to operate the movable table at least in a vertical direction, and a linear motor to operate the movable table in a first horizontal direction in a horizontal plane, including a linear motor movable element arranged inside the movable table and a linear motor stator arranged inside the movable table.

Stage apparatus

A multi-degree-of-freedom actuator includes a movable element having a plurality of permanent magnets, and a stator including a stator core and a plurality of coils. The permanent magnets are arranged in the X direction such that the number P of poles is an even number of two or more. The coils are of two types: X-direction driving coil and Z-direction driving coil. The Z-direction driving coils the number of which is P are disposed at positions opposite to magnetic poles of the permanent magnets. The X-direction driving coil or coils the number of which is P/2 are each disposed at a position opposite to an intermediate point between two adjacent ones of the magnetic poles of the permanent magnets.

Multi-degree-of-freedom actuator and stage device

Growing community of inventors

Fukuoka, Japan

Toshiyuki Kono