Kabushiki Kaisha Daini Seikosha

Seiko Instruments & Electronics Ltd.

Seiko Instruments Inc

Toshiyuki Koga

Hiroshi Ishijima

An X-ray device comprising an X-ray tube (1); a shutter (9) which is movable between an open position (not shown) in which X-rays from the X-ray tube (1) may be directed onto material (8) to be tested and a closed position (shown in FIG. 1) in which the said X-rays are prevented from being so directed; an X-ray detector (4) for detecting fluorescent X-rays emitted by said material (8) when the shutter (9) is open; means (2) movable with the shutter (9) for receiving X-rays from the X-ray tube (1) and for directing fluorescent X-rays onto the X-ray detector (4) when the shutter (9) is closed; and correction means (11-14) connected to said X-ray detector (4) for automatically correcting a change in the X-rays produced by the X-ray tube (1).

Automatic X-ray correction device

A fluorescent X-ray film thickness gauge comprises an X-ray tube for irradiating X-rays along an X-ray axis to a sample having a film coating whose thickness is to be measured, a detector for detecting fluorescent X-rays emitted from the sample, viewing means including a mirror for enabling an observer to view along the X-ray axis a target spot on the sample at which the X-ray beam is to be directed, and a collimator for collimating the X-rays into an X-ray beam and directing the X-ray beam along the X-ray axis to the target spot on the sample. In a preferred embodiment, the collimator and mirror are both mounted on a displaceable shutter member which is displaceable between a viewing position, in which the mirror is positioned along the X-ray axis to enable viewing of the target spot on the sample while the shutter member blocks the X-rays from irradiating the sample, and an irradiating position, in which the collimator is positioned along the X-ray axis to direct the X-ray beam to the target spot on the sample.

Fluorescent X-ray film thickness gauge

A flourescent x-ray device for irradiating x-rays to a sample so that flourescent x-rays emitted from the sample can be detected is described. A stationary fixed collecting plate is used instead of the movable reflecting plate employed in the prior art. The reflecting plate possesses the characteristics of being transmissive to x-rays and being reflective to visible light so that an image of the sample can be viewed by an observer and the sample can be irradiated with x-rays passing through the plate. The invention permits a remarkable decrease in manufacturing cost. Moreover, the device can be operated in a stable condition with high accuracy for a long time.

Fluorescent X-ray device

A fluorescent X-ray film thickness gauge has an X-ray source and a collimator for irradiating a sample with X-rays, and a detector for detecting fluorescent X-rays emitted by the sample. The detector has a cylindrical-shaped housing in which is formed a detector opening for receiving therethrough the fluorescent X-rays to be detected. The detector is rotatable or angularly displaceable about its longitudinal axis to adjust the position of the detector opening relative to the sample so as to effectively minimize variations in the intensity of the detected fluorescent X-rays due to variations in the distance between the sample and the detector.

Fluorescent X-ray film thickness gauge for very small areas

A thickness measuring apparatus in which a shutter is horizontally interposed between an X-ray tube and the collimator defining the irradiated area of the test piece. While the X-ray beam is thus blocked, the area of the test piece which will be irradiated is viewable, via a mirror, thru a microscope. Typically, the device is used for measuring nickel plating on a copper base for which use it is equipped with a cobalt filter.

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Tokyo, Japan

Toshiyuki Koga