Seiko Epson Corporation

Toshiyuki Kamiya

Hiroki Kawai

Akira Matsuzawa

Hideaki Oka

Takanobu Matsumoto

Mitsuhiro Yamamura

Nobuyuki Mizushima

Tsutomu Miyamoto

Hajime Kobayashi

Yasunaga Miyazawa

Yasuhiro Shimodaira

Yoshiteru Nishimura

Akihito Matsumoto

Toshioki Shimojima

Kazuhiro Tsuchiya

A robot includes a robot main body having a platform and a robot arm displaced with respect to the platform, a vibration sensor provided to the robot main body to detect a vibration of the robot main body, a collision detection section configured to detect a collision between the robot main body and a physical object based on an output from the vibration sensor, wherein the collision detection section includes a first detection section configured to detect the collision based on a vibration signal output from the vibration sensor, and a second detection section configured to detect the collision based on an extracted vibration signal obtained by extracting a vibration component with a frequency not lower than a first predetermined value from the vibration signal.

Robot, control device and control method

A force detection system includes a force detection unit that outputs a signal corresponding to an external force, a first output unit that outputs first data based on a signal output from the force detection unit, and a second output unit that outputs second data based on the signal output from the force detection unit in a system different from the first output unit. The first data and the second data are different.

Force detection system and robot

A robot includes a robot body including a base, a first movable section provided turnably with respect to the base, and a second movable section provided turnably with respect to the first movable section, a first proximity sensor for detecting contact with or approach of an object to the first movable section, and a second proximity sensor for detecting contact with or approach of the object to the second movable section. The first proximity sensor includes a first electrode section having a capacitance that changes according to the contact or approach of the object, and a first circuit section for detecting the capacitance of the first electrode section. The second proximity sensor includes a second electrode section having a capacitance that changes according to the contact or approach of the object, and a second circuit section for detecting the capacitance of the second electrode section.

Robot

A robot includes a sensor including an electrode portion of a sensor for detecting approach of or contact with another object is formed on an outer surface or an inner surface of an exterior member, and in which a drive unit of the robot main body is controlled so as to avoid approach between the robot body and the other object based on an output signal of the sensor.

Sensor and robot

A force detecting device having a first axis and a second axis orthogonal to each other, the first axis being a force detection axis, the force detecting device including a laminated body formed by laminating a first electrode, a first quartz plate, a second electrode, a second quartz plate, a third electrode, a third quartz plate, a fourth electrode, a fourth quartz plate, and a fifth electrode in this order and a force detection circuit configured to detect a force in a direction of the first axis based on an electric charge output from the second electrode and an electric charge output from the fourth electrode.

Force detecting device and robot

A force detector includes a first substrate, a second substrate, a circuit board provided between the first substrate and the second substrate, and an element mounted on the circuit board and outputting a signal in response to an external force, wherein a hole is formed in the circuit board at a location where the element is placed, and a first convex part inserted into the hole and protruding toward the element is provided on the first substrate. Further, the element is placed within a periphery of the first convex part as seen from a direction perpendicular to the first substrate.

Force detector, robot, electronic component carrying apparatus, electronic component testing apparatus, part processing apparatus, and moving object

A force detection sensor includes a base member having a first surface subjected to an external force and a second surface having a normal direction different from the first surface, and electrode fingers placed on the second surface, wherein an arrangement direction of the electrode fingers is different from the normal direction of the first surface in a plan view of the second surface. Further, the second surface includes a surface of a piezoelectric material. A constituent material of the piezoelectric material is quartz crystal. The first surface crosses an electrical axis of the quartz crystal.

Force detection sensor, force sensor, torque sensor, and robot

A force detection sensor includes a base member having a first surface subjected to an external force and a second surface having a normal direction different from the first surface, and an inter-digital electrode placed on the second surface. Further, the second surface deforms when the first surface is subjected to the force. Furthermore, the second surface includes a part formed by a surface of a piezoelectric material and the inter-digital electrode is placed in the part. The piezoelectric material is quartz crystal. The second surface is parallel to an electrical axis of the quartz crystal.

Force detection sensor having a base member with a force receiving surface and another surface with an interdigital electrode

A force detection apparatus includes a plurality of piezoelectric sensor parts placed around a first axis, and two fastening portions provided in correspondence with the piezoelectric sensor parts and applying precompression to the corresponding piezoelectric sensor part, wherein the two fastening portions are placed so that the piezoelectric sensor part may be located between the portions along a direction of the first axis. Further, four of the piezoelectric sensor parts are provided around the first axis. Furthermore, the plurality of piezoelectric sensor parts has a plurality of piezoelectric substrates.

Force detection apparatus and robot

A force detection device includes: a force sensor that has a piezoelectric element receiving a force and outputting a charge; a pre-compression unit that pre-compresses the force sensor; and a conversion output circuit that receives the charge from the force sensor and outputs a voltage. The pre-compression unit is short-circuited with a first ground of the conversion output circuit. The pre-compression unit has the same potential as the first ground. The force detection device includes a casing that accommodates the force sensor and the conversion output circuit. The casing is short-circuited with a second ground.

Force detection device and robot having a voltage generating circuit

To obtain a force detection device and a robot light in weight and having excellent detection accuracy, a force detection device includes a first member, a second member joined to the first member, and a piezoelectric element joined to the second member. A material forming the first member is different from a material forming the second member. The first member is formed in a plate shape. The piezoelectric element and the second member are disposed at an end portion of the first member. A through-hole is formed in the center portion of the first member.

Force detection device and robot

A force detector includes a first base, a second base, and a sensor therebetween. The sensor includes a side wall having a terminal, a sensor plate connected to one end of the side wall, a lid connected to the other end of the side wall to configure an inner space, a charge output element in the inner space, and a conductor electrically connecting the charge output element to the terminal. The sensor plate is between the first base and the charge output element. The lid is between the second base and the charge output element. An elastic modulus of the sensor plate is lower than that of the side wall. The charge output element includes crystal. The sensor plate includes a metal selected from stainless steel, Kovar, copper, iron, carbon steel, and titanium.

Force detector and robot

A force detecting device includes a first base section, a second base section, and a charge output element arranged between the first base section and the second base section. The charge output element includes a first board formed by a Y-cut quartz plate and a second board formed by a Y-cut quartz plate. The boards are laminated in a direction orthogonal to the normal an attachment surface of the second base section. The force detecting device detects an external force on the basis of a first output corresponding to a shearing force in a first detection direction orthogonal to the laminating direction of the first board and a second output corresponding to a shearing force in a second detection direction orthogonal to the laminating direction of the second board and crossing the first detection direction.

Force detecting device, robot, electronic component conveying apparatus

A force detector includes a first base part, a second base part, and a pressure detection unit provided between the first base part and the second base part and including a piezoelectric element that outputs a signal in response to an external force, wherein the pressure detection unit has a first member having a portion in contact with the first base part, a second member having a portion in contact with the second base part, and a third member connecting the first member and the second member, a first longitudinal elastic modulus of at least a part of the first member is lower than a third longitudinal elastic modulus of the third member, and a second longitudinal elastic modulus of at least a part of the second member is lower than the third longitudinal elastic modulus of the third member.

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Fujimi, Japan

Toshiyuki Kamiya