Nippon Pillar Packing Co., Ltd.

Mitsubishi Kasei Corporation

Mitsubishi Kasei Engineering Company

Toshiyuki Fukumoto

Ryo Imanishi

Kazukiyo Teshima

Akihiro Masuda

Masateru Yamada

Takehiro Nakamura

Takayuki Kishimoto

Kiyoshi Nishio

Takeshi Nakagawa

Kazuhiko Otawa

Norihiro Takasaki

Yasuaki Kawakami

Eiji Kariya

Kazuhisa Isayama

A resin pipe joint including: a synthetic resin-made joint body including an inner cylinder portion, an external thread portion, and a radial groove m into which an end of a tube enters; and a union nut that is made of a transparentable fluorine resin, and the union nut including an internal thread portion, a seal peripheral edge which presses a tip end portion of a tube flared portion, a slipping-off prevention peripheral edge which is actable on a large-diameter portion of a flaring changing region, and a pressing inner peripheral portion which is externally fittable to a flared straight portion.

Resinous tube joint

A resin pipe joint has: a synthetic resin-made joint body including an inner cylinder portion and an external thread portion; and a synthetic resin-made union nut including: an internal thread portion; a seal peripheral edge which is actable on a tip-end portion of a tube flared portion; a slipping-off prevention peripheral edge which is actable on a large-diameter portion of the flaring changing region; and a pressing inner peripheral portion which is externally fittable to a flared straight portion that is fitted to a straight barrel cylinder portion.

Resinous pipe joint

A polishing pad that can polish the surface of work pieces, such as semiconductor silicon wafers, with satisfactory results. Polishing pad 1.sub.1 is formed of a large number of resin polishing elements 11, all tubular with a very small diameter, inseparably bound together, outer peripheral surface to outer peripheral surface, with the axial direction tube end faces aligned on a plane, to form a plate structure 10 with two kinds of pores 12, 13, which are regularly positioned and run through the plate structure 10 in the thickness direction. Pad surface 1a of polishing pad 1.sub.1 is formed by the axial direction tube end faces of polishing elements 11 . . . . First pore 12 is the center pore in the polishing element 11. Second pore 13 is formed between the outer peripheral surfaces of the polishing elements 11 . . . .

Polishing pad

When used for connecting a fluid carrying pipe, the pipe joint for a fluid handling device of the present invention can provide a strong force for preventing the fluid carrying pipe from coming out from the pipe joint and can assure excellent sealing properties regardless of variations of the fluid temperature. The present pipe joint is arranged such that no fluid stay portion is formed. A cylindrical joint body is provided at the inner peripheral surface thereof with a receiving port into which a one-end pushing portion of a fluid carrying pipe is inserted, and at the outer peripheral surface thereof with a male screw portion. This joint body is formed integrally with the main body of the fluid handling device. Formed at the receiving port is a sealing portion inclined with respect to the axis thereof. A sealing ring having a sealing portion which comes in contact with the sealing portion of the receiving port, is pressingly inserted into one end of the fluid carrying pipe. By the threaded movement of a pushing ring as threadedly connected to a male screw portion on the outer periphery of the joint body, a sealing force is provided to both sealing portions.

Pipe joint structure for fluid device

A coupling device intended to prevent impurities such as dust and particles adhering to the end face of a solution supplying male pipe 2 from being mixed with a high purity chemical solution N, which will be supplied through the device, not to degrade the purity of the solution. It includes a check valve 7 arranged in that end portion of a solution passage 5 in the male pipe 2 which is inserted into a cleaning chamber 15, a valve pusher 44a arranged in that end portion of a solution passage 43 in a solution supplied female pipe 3 which is connected to the passage 5 in the male pipe 2 to push the check valve 7 to open the passage 5, a valve system for opening and closing the passage 43 when the female pipe 3 is reciprocated in the axial direction, and a check valve 51 located on the outlet side of a cleaning liquid passage 48.

Coupling device

A pneumatic pumping device incorporating a movable valve such as a bellows, or a diaphragm, driven by air back pressure in a cylinder so that a liquid is drawn in and discharged by reciprocating movement of the movable valve, and in which surfaces contacting the liquid on the initial and external parts of the pumping device are formed of either a single substance or a compound of a fluororesin such as PTFE, PFA, CTFE in order to feed strong acid liquid or strong alkaline liquid without corrosion on components of the pumping device.

Pneumatic pumping device

A reciprocating pump comprises a plurality of pump sections, each pump section having a suction inlet and a discharge outlet, the inlets all connecting with a common passageway through which the pumped fluid is supplied and the outlets all connecting with a common discharge passageway through which the pumped fluid is discharged. Each pump section includes a bellows which reciprocates to alternately produce suction and discharge strokes, with a change-over period between strokes. A drive control for the bellows delays the start of strokes by the bellows so that when one pump section is in a suction stroke or a change-over period, at least one other pump section is in a discharge stroke. The arrangement reduces variations in pressure in the discharge from the pump.

Reciprocating pump

A pneumatic pumping device incorporating a movable valve such as a bellows, are diaphragm, driven by air back pressure in a cylinder so that a liquid is drawn in and discharged by reciprocating movement of the movable valve, and in which surfaces contacting the liquid on the internal and external parts of the pumping device are formed of either a single substance or a compound of a fluororesin such as PTFE, PFA, CTFE in order to feed strong acid liquid or strong alkaline liquid without corrosion on components of the pumping device.

Growing community of inventors

Toyonaka, Japan

Toshiyuki Fukumoto