Jeol Ltd.

Dkk Corporation

Toshiyoshi Watanabe

Masahiko Kuwata

Kouji Miyatake

Yukio Hashizume

Kazunaga Ohno

Hiroshi Ohkubo

A silicon drift detector has an X-ray detection device, an electrode terminal subassembly for electrical connection, a Peltier device, and first and second shields formed between the electrode terminal subassembly and the Peltier device. The first shield is made of a material consisting chiefly of an element having an atomic number smaller than the average atomic numbers of the elements included in the material of the Peltier device. The second shield is made of a material consisting chiefly of an element having an atomic number greater than the atomic numbers of the elements included in the material of the Peltier device.

Silicon drift X-ray detector

An X-ray analyzing apparatus according to the invention includes an excitation ray generator for applying an excitation ray onto a sample, and an X-ray detector which is sealed in a vacuum container along with a cooling device; a first X-ray passing layer, where a first gas exists, is provided in a path through which the characteristic X-ray generated from the sample travels to the X-ray detector; X-ray transmission windows are provided on the first X-ray passing layer and on the vacuum container so as that the characteristic X-ray can reach to the X-ray detector through the windows; the first and second X-ray transmission windows are separated from each other so as to provide a second X-ray passing layer therebetween; and the second X-ray passing layer is arranged to be a vacuum or a second gas is circulated through the second X-ray passing layer. According to this construction, it can be prevented that the first gas breaks into the vacuum container in which the X-ray detector is sealed; thus the deterioration of the cooling efficiency caused in that the vacuum condition in the vacuum container is decreasing prevented, so that the consuming amount of the cooling medium for use in cooling the X-ray detector can be reduced.

X-ray analyzing apparatus

Growing community of inventors

Akishima, Japan

Toshiyoshi Watanabe