Fanuc Corporation

Toshiyasu Shiomi

Atsushi Mori

Akira Egawa

Hiroshi Takigawa

Michinori Maeda

Kazuhiro Suzuki

Yuji Nishikawa

Akihiko Nishio

Hiroyuki Yoshida

Tadashi Kurosawa

Yoshitaka Kubo

Yoshitaka Room 12-503 Fanuc Manshonharimomi Kubo

Kazuhiro Room12-602 Fanuc Manshonharimomi Suzuki

A laser apparatus includes: a cooling capacity control means which controls the cooling capacity of a heat receiving/cooling unit; a surrounding member which surrounds a dew condensation prevention target unit including a heat generating unit and which reaches a surrounding member equilibrium temperature higher than the maximum dew point temperature within a housing as the temperature of the heat generating unit is increased; and a temperature detection means which detects the temperature of the surrounding member, a control unit compares, while a current output command is being output to a laser power supply unit, a surrounding member temperature with a switching temperature previously set lower than the surrounding member equilibrium temperature and when the surrounding member temperature is lower than the switching temperature, the control unit controls the cooling capacity control means such that the cooling capacity of the heat receiving/cooling unit is a low level whereas when the surrounding member temperature is equal to or more than the switching temperature, the control unit controls the cooling capacity control means such that the cooling capacity of the heat receiving/cooling unit is equal to or higher than a standard level.

Laser apparatus including dew condensation prevention function

A gas laser oscillator includes a supply-side valve for regulating a laser gas supply to a gas chamber, an exhaust-side valve for regulating a laser gas exhaust from the gas chamber, a gas pressure measuring device for measuring a pressure in the gas chamber, and a control device functioning as a laser gas replacement measuring device. The control device makes a first measurement and a second measurement of the pressure in the gas chamber by a gas pressure measuring device at a predetermined time interval during the vacuuming or purging of the gas chamber, and determines the laser gas replacement amount per unit time during the laser oscillating operation, based on the results of the first and second measurements.

Gas laser oscillator and method of measuring laser gas replacement amount

Growing community of inventors

Yamanashi, Japan

Toshiyasu Shiomi