Fuji Xerox Co., Ltd.

Renesas Electronics Corporation

Toshiya Saitoh

Yoshiki Yamamoto

Kei Tanaka

Takahiro Maruyama

A method of manufacturing a split-gate type nonvolatile memory improving reliability and manufacturing yield. In a method of manufacturing a split-gate type nonvolatile memory in which a memory gate electrode is formed prior to a control gate electrode, a protective film is formed to cover the gate insulating film exposed between control gate electrodes before unnecessary control gate electrodes are removed.

Method for manufacturing semiconductor device

A substrate including an insulating layer, a semiconductor layer, and an insulating film stacked on a semiconductor substrate and having a trench filled with an element isolation portion is provided. After removal of the insulating film from a bulk region by a first dry etching, the semiconductor layer is removed from the bulk region by a second dry etching. Then, the insulating film in an SOI region and the insulating layer in the bulk region are removed. A gas containing a fluorocarbon gas is used for first dry etching. The etching thickness of the element isolation portion by a first dry etching is at least equal to the sum of the thicknesses of the insulating film just before starting the first dry etching and the semiconductor layer just before starting the first dry etching. After first dry etching and before second dry etching, oxygen plasma treatment is performed.

Method of manufacturing semiconductor device

A communication apparatus includes a determination portion determining a communication path over which first information to be communicated is routed, on the basis of second information corresponding to communication qualities of multiple communication paths provided between a first site and a second site.

Communication apparatus, communication system, conference system, and program product therefor

A communication system performs a communication after establishing a channel from an external host device in an external network to an internal host device in an internal network, where a firewall blocks communications from the external host device in the external network to the internal host device in the internal network while selectively allowing communications from the internal network to the external network. The external host device includes a transmitting unit that transmits channel maintenance data to the internal host device when the channel needs to be maintained, with the channel maintenance data being used for maintaining the channel.

Growing community of inventors

Tokyo, Japan

Toshiya Saitoh