Average Co-Inventor Count = 5.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Sumitomo Metal Industries, Inc. (4 from 929 patents)
4 patents:
1. 6669810 - Method for detecting etching endpoint, and etching apparatus and etching system using the method thereof
2. 6149761 - Etching apparatus and etching system using the method thereof
3. 5885472 - Method for detecting etching endpoint, and etching apparatus and etching
4. 5626714 - Method for detecting etching endpoint and etching apparatus and etching