Nippon Telegraph and Telephone Corporation

Tokyo Electron Limited

Tokyo Eletctron Limited

Toshiya Matsuda

Kana Masumoto

Kazuya Nagaseki

Kazuki Moyama

Kazuyuki Matsumura

Masaru Katayama

Tsuyoshi Moriya

Fukutaro Hamaoka

Masahiro Nakagawa

Tatsuro Ohshita

Akira Naka

Naokazu Furuya

Toru Homemoto

Satoshi Tanaka

Takeshi Seki

Masaaki Miyagawa

Kohei Saito

Kenya Iwasaki

Tadashi Mitsunari

Hidetoshi Onda

Katsutoshi Koda

An exhaust device including an exhaust mechanism and an exhaust unit is provided. The exhaust mechanism includes a first blade unit and a second blade unit provided in an exhaust space of a processing vessel including a processing space of a vacuum atmosphere for applying a process to a workpiece. The first blade unit and the second blade unit are arranged coaxially with a periphery of the workpiece, and at least one of the first blade unit and the second blade unit is rotatable. The exhaust unit is provided at a downstream side of the exhaust mechanism and communicates with the exhaust space. The exhaust unit is configured to exhaust gas in the processing vessel.

Exhaust device, processing apparatus, and exhausting method

A relay device (bA) includes an optical signal return unit () and a detection unit (). When an optical signal input via one optical transmission line () of two optical transmission lines (and) with a double-ring configuration has not been detected for a predetermined time or longer, the detection unit () outputs a disconnection signal of the optical transmission line. The optical signal return unit () is configured to, only when there is an input of the disconnection signal, return to one of the optical transmission lines () only a clamp beam that has been sent from a representative node via the other optical transmission line () in the direction opposite to the optical signal input via the one of the optical transmission lines ().

Burst optical relaying device and burst optical relaying method

A part transporting device for transporting a consumable part includes a part housing, a container, a robot arm, and a moving mechanism. The part housing accommodates an unused consumable part and a used consumable part. The container has an opening to be connected to a processing device and a gate valve for opening or closing the opening, the container being configured to accommodate the part housing. The robot arm is provided in the container and has at least one end effector at a tip end thereof, the robot arm transferring the used consumable part from the processing device through the opening to accommodate the used consumable part in the part housing and transferring the unused consumable part from the part housing to load the unused consumable part the processing device through the opening. The moving mechanism has a power source and is configured to move the part transporting device.

Part transporting device and processing system

A server that performs optical transmission using an optical transmission line includes a transmitter that transmits an optical signal to another server, a receiver that receives the optical signal from the other server, a storage device that stores data and an error correction code (ECC) added to the data, and a control unit that controls conversion of the data and the ECC into the optical signal, conversion of the optical signal into the data and the ECC, and error correction of the data using the ECC, and a transmission distance of the optical transmission line is a transmission distance for which an error rate does not exceed an allowable value of the error rate before correction which makes the error rate after correction based on the error correction using the ECC be equal to or less than a reference error rate.

Server, optical transmission method, optical transmission system, and optical transmission program

[Problem] An optical receiver using a polarization demultiplexing technique is miniaturized. [Solution] An optical receiverA for receiving a polarization multiplexed signal obtained by performing orthogonal polarization multiplexing on two optical signals. The optical receiver includes an ILsplitting the polarization multiplexed signal into two transmitted signals that are asymmetric in terms of a light transmission characteristic, O/Esandconverting the transmitted signals resulting from the split into electrical signals, a downsamplerdownsampling the electrical signals resulting from the conversion to generate low-speed digital signals, a calculatorcalculating coefficients of a polarization separation matrix from the resultant low-speed digital signals, a level adjusterA adjusting, in accordance with the coefficients resulting from the calculation, signal levels of the electrical signals resulting from the conversion to generate a plurality of adjustment signals, addersAa andAb adding the generated adjustment signals to generate addition signals, and discriminatorsandrestoring and extracting the two optical signals from the generated addition signals.

Optical receiver

A method includes estimating a replacement time of a consumable part of a processing device, specifying a timing after substrate processing of the processing device is completed in a period before the replacement time as a replaceable timing of the consumable part, estimating a movement time period required for the part transporting device to move to a position of the processing device requiring the replacement, and estimating a preparation time period required for preparation until the part transporting device moved to the position of the processing device requiring the replacement becomes a state in which the consumable part is replaceable. The method further includes transmitting a replacement instruction to the part transporting device at a timing before a timing that is earlier than the replaceable timing by a total time of the movement time period and the preparation time period, and instructing the replacement of the consumable part.

Processing system and method using transporting device facilitating replacement of consumable part

A function of detecting an unused path through which actual data is not transmitted in a long-distance redundant network is realized at low cost. In an optical transmission system, each of the optical transceiversandthat are connected to each other by an optical fiber cableand disposed separately includes a protocol IC unit. The protocol IC unittransmits an idle signal Awith empty data using an optical signal Pto an unused path of the optical fiber cable. At the time of this transmission, the protocol IC unitoutputs, to the transmission unit, a control signal Cfor performing, at a fixed modulation period, ON/OFF modulation on the optical signal Pon which the idle signal Ais superimposed. Also, the protocol IC unittransmits an OAM signal Oat an OAM period that is a period different from a modulation period, and performs control to turn ON the control signal Cat the time of this transmission. The protocol IC unitperforms control to set the QAM period Tas a period longer than or equal to a plurality of modulation periods T. The transmission unitis configured to perform ON/OFF modulation on the optical signal Pusing the control signal C, and transmits the modulated optical signal P

Optical transmission system and unused channel verification method

An unused path through which actual data is not transmitted in a long-distance redundant network can be appropriately detect, and this function is realized at low cost. A transmission unitof optical transceiversandconnected to each other by an optical fiber cablein an optical transmission systemincludes a laserfor emitting a laser beam serving as an optical signal Pto the optical fiber cable, and an optical intensity control unitfor performing control to change the optical level of the optical signal of the laser beam. Each of the optical transceiversandincludes a control unitfor superimposing each of an idle signal A, an OAM signal O, and an actual data signal Don an XGMII signaland outputting this XGMII signalto the transmission unitthat transmits the optical signal P, and a signal determination unitfor determining unique information regarding each signal output to the transmission unitand outputting a determination result signal. The optical intensity control unitperforms control to change the optical level of the optical signal Pon which a signal of the determination of each signal indicated by the determination result signalis superimposed to different optical levels Lto Lbetween the signals.

Exhaust device for processing apparatus provided with multiple blades

An object is to provide a dispersion compensating system with a large amount of dispersion compensation and reduced operation costs. Disclosed is a dispersion compensating system in which a core node and an access node are connected through a ring network, the access node includes a delay measurement unit configured to receive delay measurement signals from the core node to measure a delay between the core node and the access node, an average dispersion amount calculation unit configured to calculate an amount of dispersion compensation to be applied to an optical burst signal prior to transmission to the ring network, based on the delay thus measured, and a real-part inverse dispersion application unit configured to perform pre-equalization on a waveform of the optical burst signal prior to the transmission, based on the calculated amount of dispersion compensation.

Dispersion compensation system and dispersion compensation method

[Problem] To allow addition of new functions to an optical module at a low cost. [Solution] An optical transceiverincludes a CPUconfigured to perform download control of a program for executing an additional function to be newly added to the optical transceiver, a wireless transmitting and receiving deviceconfigured to receive, in accordance with the download control, the program from a terminal devicethat stores various programs, and a memory unitconfigured to store the program that is received. The CPUis configured to perform, by interrupting a monitoring and control signal from a transmission device, control to write data related to transmission and reception processing of a Txand a Rxin accordance with execution of the programs stored in the memory unitin a storage area at a specific address of an EEPROM

Optical transceiver

A temperature measurement substrate according to an embodiment of the present disclosure includes: a substrate which is any one of a semiconductor wafer and a substrate for a flat panel display; and at least one optical fiber laid on a surface of the substrate and having a first pattern portion and a second pattern portion formed more densely than the first pattern portion.

Temperature measurement substrate and temperature measurement system

An optical transmitter generates two modulated optical signals by modulating two optical carriers respectively with two binary bit sequences by on-off keying and generates an orthogonal polarization multiplexed optical signal from the two modulated optical signals. The two optical carriers respectively have peak frequency components spaced apart from each other by a predetermined frequency difference and located such that a central frequency of a WDM channel of a WDM grid falls between the peak frequency components. An optical receiver separates the orthogonal polarization multiplexed optical signal into two signals in which components of the two modulated optical signals are combined with different combination ratios, by means of a 1-input, 2-output asymmetric filter whose two optical transmittances intersect at the WDM grid and each have a free spectral range equal to or twice the channel spacing of the WDM grid, and restores the two modulated optical signals from the separated two signals using a DSP.

Optical transmitter, optical receiver, and optical transmission system

A digital signal processor which performs digital signal processing of a digital signal includes a statistical analysis method which calculates a moving average and a standard deviation from the digital signal, performs statistical decision deciding whether or not the digital signal is within a predetermined range obtained from the moving average and the standard deviation, and corrects the digital signal outside the range within the range. Statistical analysis of the digital signal is performed, thereby suppressing transient changes without increasing the number of times of averaging during the digital signal processing.

Digital signal processing device

A receiver is configured to have two coherent receivers using two pieces of local oscillator of optical frequencies fand fclose to optical frequency fof signal light, the two pieces of local oscillator being controlled to have a predetermined optical frequency spacing &#x394;F, and a digital signal processor demodulating transmission data signal sequences based on outputs from the coherent receivers. When the frequency difference &#x394;fof one of the two pieces of local oscillator from a virtual reference frequency f' close to the optical frequency fof the signal light is set, the digital signal processor obtains the frequency difference &#x394;fof the other of the two pieces of local oscillator by calculating &#x394;f&#x2212;&#x394;F, inputs electric signals output from the two coherent receivers, and compensates the phase rotation caused in the electric signals by frequency differences &#x394;fand &#x394;f

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Tokyo, Japan

Toshiya Matsuda