Murata Manufacturing Co., Ltd.

Toshiya Kawate

Kazunari Kawahata

Hiroshi Nishida

Hiroshi Nishikawa

Yoshihiro Konaka

Provided is a MEMS module that includes a MEMS element having a first capacitor electrode that can be displaced, a second capacitor electrode that opposes the first capacitor electrode, and driving electrodes that cause the first capacitor electrode to be displaced. The driving electrodes are connected to a control unit that applies a driving voltage to the driving electrodes and monitor terminals for detecting power. Thus, an element for monitoring power is not needed and a MEMS module, a variable reactance circuit and an antenna device are provided that are capable of realizing smaller size and lower loss.

MEMS module, variable reactance circuit and antenna device

A variable capacitance device includes a fixed substrate, a movable portion, driving electrodes, an RF capacitance electrode and an insulating film. The movable portion faces the fixed substrate and can change a gap between the movable portion and the fixed substrate. The driving electrodes are formed on the fixed substrate so as to face the movable portion. The RF capacitance electrode is formed on the fixed substrate so as to face the movable portion and be spaced apart from the driving electrodes. The insulating film is formed between the movable portion and the driving electrodes. The level of a voltage applied to the driving electrodes and the level of a voltage applied to the movable portion are periodically switched and the level of a voltage applied to the RF capacitance electrode and the level of a voltage applied to the movable portion are always the same.

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Kyoto, Japan

Toshiya Kawate