Yokogawa Electric Corporation

Yokogawa Hokushin Electric Corp.

Toshitsugu Ueda

Fusao Kohsaka

Toshio Iino

Hiroshi Nakayama

Daisuke Yamazaki

Takehiko Kitamori

Tsuguo Sawada

Yukihiko Takamatsu

Hisao Takahara

Yoshinobu Sugihara

Hideo Akazawa

Seiichi Naitou

A particle analyzer system that reduces size and cost, wherein particles are introduced into a cell, then the particles are irradiate in the cell with a laser beam, then atomic emission of the particles generated by the irradiation of the laser beam is transmitted, then a spectrum is obtained of the photo emission so transmitted, and the spectrum of the photo emission is detected and the wavelength of the laser beam is, other than the wavelength of the emission of the particles, is used to provide a filter to block the intrusion of the wavelength of the laser beam in a stage proceeding the photo emission.

Particle analyzer system

An encoder device of the absolute position type for outputting a shift position or angle of rotation relative to the absolute position. The device comprises a code plate having first and second grid patterns wherein information is stored as 1 or 0 in a periodic manner at pitches slightly different from each other; first and second sensory arrays for detecting the first and second grid patterns; driving means for driving the sensors relative to the grid patterns and for obtaining an alternating signal from each array; and computation means for measuring the phase angle of the alternating signal from each array, and the phase angle difference therebetween and for calculating the position using such phase angles. Advantageously, the invention is suitable for miniaturization due to its simplicity, relaibility, and efficiency.

Absolute encoder for linear or angular position measurements

A quartz thermometer adapted to measure the ambient temperature through detection of a change in the resonance frequency of a quartz resonator due to change in the temperature, wherein a quartz wafer of 0.02 to 0.2 mm thickness is cut from a region of a quartz within -30.degree. to -70.degree. in terms of rotation angle about the X axis of the quartz thereby to form a quart resonator within a range of between -15.degree. to +15.degree. in terms of angle of rotation about the Z' axis within the plane of the quartz wafer; and wherein thin metallic films are formed on the surfaces of the resonator to serve as exciting electrodes. The resonator and electrodes are produced by photolithography and anisotropic quartz etching processes. The resulting quartz thermometer has a large first order temperature coefficient of frequency.

Quartz thermometer

A pressure measuring apparatus comprising a diaphragm to which pressure to be measured is applied and a resilient vibrator connected to the diaphragm, which acts to produce a signal based on its natural frequency relative to the pressure, wherein the diaphragm comprises a peripheral circumferential portion, a central fixing portion and a non-planar intermediate portion therebetween, with the central portion being connected to the vibrator and having its edge disposed at a non-perpendicular angle with respect to the vibrator area to which it is connected. The apparatus eliminates adverse influences due to initial distortion, hysteresis of the diaphragm and produces accurate measurements.

Apparatus for measuring pressure

A pressure sensor which detects delicate changes in pressure as small as 0.01 .mu.m water column by detecting displacement or torque in a movable plate. The sensor comprises a fixed plate in which slits are formed, a movable plate on which pressure to be measured is impressed, a supporting member which supports the movable plate at two points on a straight line passing through its center of gravity so as to enable the movable plate to rotate thereabout, and a detecting means for detecting displacement or torque in the movable plate. The different pressures act on the movable plate to cause the rotation thereof and the displacement or torque so that such displacement corresponds to the pressure difference.

Pressure sensor

Herein disclosed is a mechanical vibrating element which can be used as a resonator made operative to resonate in a predetermined frequency, a filter having a frequency selecting property or an optical deflector adapted to be mechanically dislocated in accordance with an input signal for deflecting an optical beam. The mechanical vibrating element according to the present invention is characterized in that a single insulating substrate constructs a frame and a moving portion supported by the frame, in that the moving portion is formed with a conductive pattern or a coil, and in that an electric current is fed to the conductor or the coil, while appling a magnetic field in the same direction as the plane direction of the insulating substrate, so that the moving portions may be mechanically vibrated.

Growing community of inventors

Tokyo, Japan

Toshitsugu Ueda