Yamaha Corporation

Yamaichi Electronics Co., Ltd.

Toshitaka Yoshino

Masahiro Sugiura

Atsuo Hattori

Tetsutsugu Hamano

Atsushi Toyoda

Shuichi Sawada

Keiichi Shinoda

A probe unit comprises a flexible substrate made of an inorganic substance and having an almost straight edge, an electro conductive film formed on a surface of the substrate and having a plurality of contact parts aligned on a surface of the edge and can contact with electrodes of a sample and lead parts connected to the contact parts, wherein the substrate is elastically deformed together with the contact part while the plurality of the contacts parts are supported by the edge when a force is added to press a surface of the contact part.

Probe unit and its manufacturing method

A sacrificial layer is formed in a recess of a substrate, and leads extending from the substrate into an area of the sacrificial layer are formed. A cut is formed from the bottom surface of the substrate, the cut extending from the bottom surface to the area of the sacrificial layer via the substrate, then the sacrificial layer is removed. A probe unit can be obtained having the leads whose front portions extend beyond the edge of the substrate. A through conductor may be formed in a through hole formed in a substrate. Leads may be formed on a photosensitive etching glass substrate to thereafter selectively etch the chemically cutting type glass.

Manufacture of probe unit having lead probes extending beyond edge of substrate

After both an ABS and a back surface of a slider are lapped, a one-surface lapping resulting in balanced compressive stresses of the ABS is performed resulting in unbalanced stresses to make the ABS flat while warping the ABS. At this stage, the slider deforms by changing the back surface in a convex shape, and the ABS itself is maintained flat by the lapping. Thereafter, a one-surface lapping of the back surface is performed to reduce the compressive stresses therein and make the back surface flat while warping the back surface. The slider deforms by changing the ABS in a convex shape and a positive crown on the ABS is formed. The ABS can be lapped flat, and in addition the crown can be formed. Reliability of data read/write can be improved.

Method of lapping for producing one-side curved surface adapted for

Growing community of inventors

Hamamatsu, Japan

Toshitaka Yoshino