Ignite, Inc.

Toshitaka Torikai

Fusao Ishii

Victor Stone

A Micro-Electro-Mechanical Systems (MEMS) device includes a substrate, an electronic circuit on the substrate, an electrode electrically connected to the electronic circuit, a movable element that is controlled by applying a voltage between the electrode and the movable element, an insulating layer between the electrode and the electronic circuit, and an etch stop layer. The insulating layer has a via electrically connecting the electrode and the electronic circuit, and the etch stop layer is made of at least one of Aluminum nitride or Aluminum oxide. The etch stop layer may cover the electrode and the electronic circuit, or the electrode may be mounted on the etch stop layer, electrically connected to the electronic circuit through the etch stop layer by the via.

MEMS display device with an etch-stop-layer

A micro-electro-mechanical systems device includes a substrate, each of an electronic circuit, an etch stop layer, and a hinge base mounted on the substrate, and an electrode connected to the circuit. A hinge is mounted on the base and is made of a doped semiconductor. The hinge includes a vertical support that extends vertically from the base, and a horizontally-extending hinge tab contacts the vertical support. The device also includes a movable mirror and a mirror via that couples the mirror to the hinge tab. The mirror is electrostatically attracted to the electrode responsive to application of a voltage between the electrode and the mirror, and movement of the mirror changes a relative position between the hinge tab and the vertical support. A stopper is mounted on the substrate that mechanically stops the movement of the mirror before the mirror contacts the electrode or etch stop layer.

MEMS display device with a vertical hinge

A Micro-Electro-Mechanical Systems (MEMS) device includes a substrate, an electronic circuit mounted on the substrate, a movable element mounted on the substrate whose movement is controlled by application of an operating voltage by the electronic circuit, a stopper mounted on the substrate that stops the movement of the movable element through mechanical contact of the stopper with the movable element, and an auto-inspection mechanism that applies a test voltage between the movable element and the stopper and determines whether or not a leak current is present. The auto-inspection mechanism is mounted, at least in part, on the substrate. The test voltage is lower than the operating voltage.

MEMS display device with auto-inspection mechanism

An image display system includes an array of pixel elements, column drivers, row drivers, a look up table memory, and a controller. Input video data including gradation information of an input image is received. According to rules of a look up table, the input video data is assigned to multiple groups, binary signals for respective groups are generated using the respective input video data assigned to each group, and an order of the binary signals within at least some groups is rearranged to form respective binary control signals without conflicting state changes. The controller transmits the binary control signals to the column drivers and transmits a select signal that selects the row drivers. Alternatively, the controller transmits the binary control signals to the row drivers and transmits a select signal that selects the column drivers. The select and binary control signals are in synchronization with a clock signal.

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Sagamihara, Japan

Toshitaka Torikai