Fujikin Inc.

Other

Toshirou Nariai

Nobukazu Ikeda

Akihiro Morimoto

Yukio Minami

Keiji Hirao

Kouji Kawada

Osamu Nakamura

Katunori Komehana

Teruo Honiden

Touru Hirai

Masaharu Taguchi

Tadahiro Ohmi

A reactor for generating moisture, with which hydrogen and oxygen fed into the reactor contact with a platinum coating catalyst layer to activate reactivity so that hydrogen and oxygen react under conditions of non-combustion, wherein the reactor includes a cooler comprising a heat dissipation body substrate in which a heater insertion hole is made in the center to fix to the outer surface of the reactor structural component on the outlet side and a cooler on the outlet side made up of a plural number of heat dissipation bodies installed vertically in parallel on the part excluding the area where the afore-mentioned heater insertion hole of the heat dissipation body substrate exists, and a part of the heater to heat the reactor is inserted in the heater insertion hole so as to fix to the outer surface of the reactor structural component on the outlet side.

Reactor for generating moisture and moisture generating and feeding apparatus for which the reactor is employed

A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.

Apparatus and reactor for generating and feeding high purity moisture

Growing community of inventors

Osaka, Japan

Toshirou Nariai