Mitsubishi Heavy Industries Limited

Toshiro Kobayashi

Kazuto Kobayashi

Hideki Ito

Keiichi Sato

Masaki Kawano

Toyoaki Yasui

Kazuo Murakami

Yasuhiro Sakaguchi

Tatsufumi Aoi

Susumu Kamikawa

Katsunari Ohsono

Mitsuo Kato

Hiroko Kitamoto

Shigenari Horie

Hideaki Takatani

Kozo Wada

Hiroaki Ogasawara

Takuya Moriga

Atsushi Oda

Akihiko Yamada

Yoshitaka Tsumoto

An evaporation source having a nozzle structure that makes the distribution of film thickness uniform in the width direction of a substrate and a vacuum evaporator using the same are provided. A vapor produced by evaporation or sublimation by heating to evaporation material is discharged from a long nozzle opening like a band. A deposited substrate is transferred in a direction perpendicular to the longitudinal direction of the nozzle opening while facing the nozzle opening. A discharge flow rate of vapor per unit area in the longitudinal direction of the nozzle opening is made to be maximum in a portion at a nozzle width direction position corresponding to a substrate edge position rather than a central part of the nozzle opening and a plurality of partition plates providing directivity to the flow of vapor are arranged inside the nozzle opening.

Evaporation source and vacuum evaporator using the same

An object is providing an electrostatic attraction apparatus and an attracting/releasing method capable of reliably attracting and quickly releasing a glass substrate. An attraction force for attracting a glass substrate is obtained according to the physical properties of the glass substrate. In addition to obtaining an attraction voltage (V(t)) required for obtaining the attraction force, a holding voltage (V(t)) for holding an attraction state and a release voltage (V(t)) for releasing the glass substrate are also obtained (Sto S). Attraction time period (t) is actually measured and if this measured time is different from a preset attraction time (t), the holding voltage (V(t)) and the release voltage (V(t)) are recalculated according to the actually measured attraction time period (t) (Sto S).

Electrostatic attraction apparatus for glass substrate and method of attracting and releasing the same

There is provided a hydrogen separation membrane capable of providing high hydrogen permeability and accommodating an increase in pressure difference, a hydrogen separation unit, and a manufacturing method for a hydrogen separation membrane. The hydrogen separation unithas a hydrogen separation membraneand a metallic porous support sheetattached to the hydrogen separation membrane. By forming a plurality of pits in the surface of the hydrogen separation membrane, a thick-wall portionhaving a large thickness and a thin-wall portionhaving a small thickness are provided on the hydrogen separation membrane. Also, as a method for forming pits i.e. thin-wall portions, etching process is used.

Hydrogen separation membrane, hydrogen separation unit, and manufacturing method for hydrogen separation membrane

A polymer electrolyte fuel cell comprising a cell having a solid polymer film, separators disposed on both sides of the cell so as to interpose the cell therebetween, and diffusion layers disposed between the cell and the separators and each having a substrate comprising an electrically conductive porous material and a slurry layer disposed on the substrate, wherein at least a part of each diffusion layer is provided with a gas barrier for preventing the permeation of gas in a direction parallel to the major surface of the diffusion layer.

Solid polymer type fuel battery

An aluminum powder is mixed with a neutron absorber powder through cold isostatic press to form a preliminary molding. The preliminary molding is then subjected to sintering under no pressure in vacuum. After sintering, a billet is subjected to induction heating and hot extrusion to form a square pipe.

Method of manufacturing a radioactive-substance storage member, billet for use in extrusion of the same, and square pipe

A rectangular pipe is molded by mixing aluminum powder with powder of a neutron absorbing material, molding a premolded body by means of cold isostatic pressing (CIP), canning the premolded body, sintering the premolded body by means of hot isostatic pressing (HIP), performing outer cutting and end face cutting on the can after the sintering, taking a billet out of the can, and extruding this billet.

Manufacturing method for spent fuel storage member and mixed power

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Hiroshima, Japan

Toshiro Kobayashi