Satake Corporation

Japan Science and Technology Agency

Other

Kanagawa Academy of Science and Technology

Fujitsu Corporation

Minolta Company, Ltd.

Riken Corporation

Nippon Seiko Kabushiki Kaisha

Research Development Corporation

Research Development Corporation of Japan

Seiko Seiki Kabushiki Kaisha

Nalux Co., Ltd.

Mitsubishi Materials Corporation

Kabushiki Kaisha Toyoda Jidoshokki Seisakusho

Aida Engineering, Ltd.

Toshiro Higuchi

Sze Keat Chee

Takafumi Ito

Takeshi Yano

Takashi Nishisako

Toru Torii

Tadashi Matsushita

Toshitada Hirata

Tomohiro Taniguchi

Saku Egawa

Katsuhide Natori

Teruhiko Takeuchi

Toshiki Niino

Takashi Ban

Kazuhiko Yukawa

Yutaka Yamagata

Hideo Yokota

Akitake Makinouchi

Takeshi Mizuno

Masao Hiyane

Hitoshi Kimura

Minoru Kurosawa

Yoshimitsu Fukuda

Yukio Tsutsui

Takeshi Kamima

Shingo Okushima

Hiroshi Ueno

Akira Hamamatsu

Kenji Takenaka

Masahiro Watanabe

Ryuichi Yoshida

Takanori Okabe

Takeshi Takizawa

Takeo Nakagawa

Hiromasa Fukuyama

Hiromichi Hiramatsu

Kozo Inoue

Ryutaro Himeno

Fumio Tabata

Takahisa Ban

Norimasa Ikeda

Shigeki Kamei

Akio Yano

Kojiro Kawaguchi

Eiji Yoshimura

Yoshinori Kawawa

Hironori Arii

Noboru Aikawa

Yoshinobu Mizuno

Kunio Ebihara

Masanori Kunieda

Akira Imura

Atsushi Yoshiki

Ju Jin

Manabu Kanemoto

Takeshi Sawamoto

Minoru Tanaka

Hazime Izumi

Mutsuo Munekata

Sakiko Nakamura

Tsunehiko Shibata

Kenichi Kudoh

Joon Wan Kim

Kazuo Yakuwa

Provided is a piezoelectric valve in which the valve is opened/closed utilizing a displacement of a laminated piezoelectric element, including: a valve main body having a gas pressure chamber that receives compressed gas supplied externally; and an actuator having a valving element, the laminated piezoelectric element that generates a driving force required for operating the valving element as the displacement, and a displacement enlarging mechanism that enlarges the displacement of the laminated piezoelectric element to be acted on the valving element, the actuator being disposed in the valve main body, in which a surface of the laminated piezoelectric element is coated with silicone in a state in which the laminated piezoelectric element is integrated into the actuator.

Piezoelectric valve and method of manufacturing the piezoelectric valve

Provided is a piezoelectric actuator that can reduce a risk of air leakage due to weakening of pressing force of a valve element against a valve seat surface and airtightness. The piezoelectric actuator is used for a piezoelectric valve that opens and closes a valve utilizing displacement of a laminated piezoelectric element. The piezoelectric actuator includes: a valve element; a laminated piezoelectric element that generates a driving force, required for operation of the valve element, as a displacement; and a displacement enlargement mechanism that enlarges a displacement of a laminated piezoelectric element and causes the enlarged displacement to act on the valve element. In the piezoelectric actuator, a surface of the valve element to be in contact with a valve seat of the piezoelectric valve is made flat and smooth in a state in which a tensile load is applied to the laminated piezoelectric element.

Piezoelectric actuator, piezoelectric valve, and method of manufacturing piezoelectric actuator

A piezoelectric valve includes: a valve main part including a gas pressure chamber receiving compressed gas supplied from outside; a plate inside the valve main part, and an actuator fixed to the plate and inside the valve main part, which is a case with an opening on a front surface. The plate includes a gas discharge path and a valve seat coming into contact with a valve element of the actuator opening and closing the gas discharge path. A lid member that closes the opening of the case has a gas discharge opening communicating with the gas discharge path of the plate; is welded and fixed to a front surface of the plate, where the gas discharge path opens, on an annular welded part surrounding the gas discharge opening; and is welded and fixed to an end surface of the case on an annular welded part on the outer peripheral part.

Piezoelectric valve and method for manufacturing piezoelectric valve

A piezoelectric valve, having superior responsiveness during valve opening and capability to stabilize gas supply at an early stage, includes a gas pressure chamber receiving compressed gas and an exhaust path discharging the compressed gas from the gas pressure chamber; a valve disc placed in the gas pressure chamber to open and close the exhaust path; a piezoelectric element generating a driving force for operation of the valve disc, as a displacement; a displacement magnifying mechanism magnifying the displacement of the piezoelectric element and applying the magnified displacement to the valve disc; and driving means including a signal generator generating a signal including a first prepulse, a second prepulse, and a main pulse, applies a drive voltage to the piezoelectric element using the signal generated by the signal generator, as an input signal to a drive circuit, and drives and opens the valve disc by expanding the piezoelectric element.

Piezoelectric valve, method for driving piezoelectric valve, and optical particulate separator equipped with air-jet means using piezoelectric valve

A deposition apparatus includes a dome rotatable around the central axis; a loop chain surrounding the central axis on the dome; a power transmission shaft transmitting rotational motion of the dome; a first gear section transforming the rotational motion of the dome to rotational motion of the shaft; a second gear section provided with a chain-driving sprocket and configured to transform the rotational motion of the shaft to rotational motion of the sprocket; and a tray holder located beside the loop chain, the tray holder including a first internal power transmission shaft and a rotating portion holding a tray. The sprocket is rotated through the rotation of the dome to drive the loop chain, the first internal power transmission shaft of the tray holder is rotated by motion of the loop chain, and the rotating portion is rotated through rotation of the first internal power transmission shaft.

Deposition apparatus and manufacturing process including film forming step by deposition apparatus

A deposition apparatus includes a deposition source; a rotatable dome provided with an opening which covers the source; a first lever provided outside of the dome; and a tray holder including a frame including a first rotating member and a rotating part including a second rotating member and being attached to the frame such that the rotating part rotates with the second rotating member around an axis supported by the frame. The rotating part includes work-holding trays arranged around the axis, the tray holder is installed on the dome such that a side of one of the trays covers the opening, the first rotating member is rotated by the first lever during rotation of the dome, and the second rotating member is rotated with the rotating part by the first rotating member so as to change the tray a side of which covers the opening to another one.

Deposition apparatus and tray holder

A method and an apparatus for producing various types of microdroplets are provided. The apparatus has a cross intersection portionat which a first continuous phase, a first dispersion phase, and a second dispersion phaseintersect with each other; a first liquid feed devicecontrolling the first dispersion phase; a second liquid feed devicecontrolling the second dispersion phase; and a control deviceconnected to the first liquid feed deviceand the second liquid feed device, in which the first liquid feed deviceand the second liquid feed deviceare controlled by a signal from the control deviceso that microdropletsformed of the first dispersion phaseand microdropletsformed of the second dispersion phaseare sequentially produced.

Method and device for producing microdroplets

Ejector valve

Nozzle apparatus

A piezoelectric valve stably supplies gas even for a long gas ejection time, with a high responsivity to opening the valve, is provided. The piezoelectric valve, including a gas-pressure-chamber for receiving a compressed gas supplied from outside, a gas-discharge-channel through which the compressed gas is discharged from the gas-pressure-chamber, comprises: a valve body disposed in the gas-pressure-chamber and opens/closes the gas-discharge-channel; a piezoelectric element for producing a driving force to move the valve body as a displacement; a displacement-enlarging-mechanism for enlarging the displacement of the piezoelectric element to act on the valve body; and a driving unit having a signal-generating-unit for generating a signal comprising a pre-pulse and a main pulse and provides the signal generated by the signal-generating-unit to a driving circuit as an input signal to apply a driving voltage to the piezoelectric element to make the piezoelectric element expand and drive the valve body open.

Piezoelectric valve, and optical particulate matter sorter provided with air-blowing means that uses piezoelectric valve

A piezoelectric valve whose assembly work can be efficiently performed. A piezoelectric valve according to this invention includes a valve main body having a gas pressure chamber which receives compressed gas supplied from the outside, a plate which is disposed inside the valve main body and is fixed to the valve main body, and actuators each of which has a valve element, a piezoelectric element generating, in the form of a displacement, driving force required for operation of the valve element, and a displacement magnification mechanism for magnifying a displacement of the piezoelectric element and causing the magnified displacement to act on the valve element, are fixed to each of two surfaces of the plate, and are disposed inside the valve main body together with the plate.

Piezoelectric valve, and optical granulated substance sorter equipped with air-blowing means that uses this piezoelectric valve

A process and apparatus for rapidly producing an emulsion and microcapsules in a simple manner is provided wherein a dispersion phase is ejected from a dispersion phase-feeding port toward a continuous phase flowing in a microchannel in such a manner that flows of the dispersion phase and the continuous phase cross each other, thereby obtaining microdroplets, formed by the shear force of the continuous phase, having a size smaller than the width of the channel for feeding the dispersion phase.

Process and apparatus for producing emulsion and microcapsules

An optical granular material-sorting apparatus includes: a transfer means for transferring objects being sorted; an optical detection means for detecting, at a detection position, objects being sorted as they drop from an end of the transfer means; and a blasting means provided below the optical detection means and designed to blow away objects being sorted through blasting of air based on the result of detection by the optical detection means. The blasting means has a piezoelectric valve which is driven by a driving means to blast air based on the result of detection by the optical detection means. The driving means applies voltage to a piezoelectric element in multiple stages so as to suppress fluctuation in the amount of gas ejected from a gas release channel when the valve opens.

Optical granular material-sorting apparatus utilizing piezoelectric valve

A method and an apparatus for producing various types of microdroplets. The apparatus has a cross intersection portion at which a first continuous phase, a first dispersion phase, and a second dispersion phase intersect with each other. A first liquid feed device controls the first dispersion phase and a second liquid feed device controls the second dispersion phase. A control device is connected to the first liquid feed device and the second liquid feed device. The first liquid feed device and the second liquid feed device are controlled by a signal from the control device so that microdroplets formed of the first dispersion phase and microdroplets formed of the second dispersion phase are sequentially produced.

Method and device for producing micro-droplets

A piezoelectric valve comprising: a valve main body formed in which are a gas pressure chamber that takes in compressed gas supplied from the outside as well as a gas release channel through which the compressed gas is released from the gas pressure chamber; a valve body placed in the gas pressure chamber to open and close the gas release channel; a piezoelectric element that generates, in the form of displacement, a driving force needed to operate the valve body; at least one displacement amplification mechanism that amplifies a displacement of the piezoelectric element and causes it to act upon the valve body; and a driving means for applying voltage to the piezoelectric element in order to drive the valve body to open the valve and thereby open the gas release channel; wherein such piezoelectric valve is characterized in that the driving means applies voltage to the piezoelectric element in multiple stages so as to suppress fluctuation in the amount of gas ejected from the gas release channel when the valve opens.

Piezoelectric valve and optical granular material-sorting apparatus utilizing such piezoelectric valve

Growing community of inventors

Yokohama, Japan

Toshiro Higuchi