Ube Industries, Inc.

Kyushu University

Fujikoshi Machinery Corp.

Nagaoka University of Technology

Fujibo Holdings, Inc.

Toshiro Doi

Mitsui Minings & Melting Co., Ltd.

Yasuhide Yamaguchi

Tadakazu Miyashita

Takafumi Kawano

Atsushi Kajikura

Hiroshi Kashiwada

Masataka Takagi

Dai Inamori

Hideo Aida

Hidetoshi Takeda

Syuhei Kurokawa

Kiyoshi Seshimo

Tadashi Hasegawa

Yasuhiro Kawase

Osamu Ohnishi

A work processing apparatus performs processing of a surface to be processed of a work by causing a processing head to come into sliding contact with the work held on an upper surface of a holding plate. The processing head includes a plasma electrode that generates plasma and radiates the plasma to the surface to be processed of the work. In the plasma electrode, an annular or solid cylindrical central electrode provided at a center in a radial direction and an annular outer circumferential electrode provided at an outer side in the radial direction with respect to the central electrode are arranged with an annular slit portion intermediating therebetween at a boundary position thereof, the slit portion is configured as a plasma generation space, and a processing pad is provided at bottom surfaces of the central electrode and the outer circumferential electrode.

Work processing apparatus

The present invention provides a polishing pad including a polishing member having a polishing surface, wherein the polishing member contains a material having dilatancy characteristics.

Polishing pad and polishing method

A ceramic composite for light conversion comprising a solidified body in which crystalline phases of oxides are three-dimensionally entangled and a method for manufacture thereof. A manufacture method of a ceramic composite for light conversion is characterized in that a polishing step is provided in a chemical mechanical polishing (CMP) process applied to the surface of a solidified body with a structure in which an AlOphase and other phases are three-dimensionally entangled.

Ceramic composite for light conversion and method for manufacture thereof

Growing community of inventors

Fukuoka, Japan

Toshiro Doi