Hitachi, Ltd.

Shinyei Kaisha

Toshio Yoshida

Naotatsu Asahi

Naomasa Sunano

A gas sensor includes a pair of electrodes printed on an electrically insulating substrate, a sensitive layer deposited on tip portions of the electrodes and a part of the substrate adjacent to the tip portions and bridging the space between the electrodes at the tip portion, and a protective film deposited on the electrodes and a part of the substrate adjacent to the tip portion so that a part of each electrode covered with the sensitive layer is free of the protective film. The sensitive layer is formed by depositing titanium oxide by plasma spraying on the substrate, and then heat-treating the deposited titanium oxide, so as to provide a diffusion reactive layer between the sensitive layer and the substrate and to form fine grooves on the surface of the sensitive layer.

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Kasukabe, Japan

Toshio Yoshida