Yamaichi Electronics Co., Ltd.

Koshin Kogaku Co., Ltd.

Toshio Yamanoi

Takashi Endo

To provide a miniaturized Fabry-Perot type tunable filter that can be applied to e.g. a light of wide wavelength range from infrared rays to ultraviolet rays and actuated at a low voltage. A movable portion moving in a direction parallel to the surface of the SOI substrate (hereafter called 'plane direction'), a suspension supporting member supporting the movable portion elastically and movably, and a fixed portion secured to the SOI substrate are provided. By the comb-teeth electrode of the comb-teeth type electrostatic actuator that moves the movable portion, the first mirror structure body formed bonding to the surface of the movable portion is controlled and moved in the plane direction. The Fabry-Perot type tunable filter has a structure in which the first mirror surface of the first mirror structure body and the second mirror surface of the second mirror structure body formed by bonding to the surface of the fixed portion are arranged facing to each other in parallel, and the length thereof is changed by the move of the plane direction.

Growing community of inventors

Kanagawa, Japan

Toshio Yamanoi