Sony Corporation

Other

Toshio Terano

Toshio Kobayashi

Kazumasa Nomoto

Ichiro Fujiwara

Akihiro Nakamura

Hideto Tomiie

To propose a new channel structure suitable for high efficiency source side injection, and provide a non-volatile semiconductor memory device and a charge injection method using the same. The non-volatile memory device includes a first conductivity type semiconductor substrate (SUB), a first conductivity type inversion layer-forming region (CH), second conductivity type accumulation layer-forming regions (ACLa, ACL), second conductivity type regions (S/D, S/D), an insulating film (GD) and a first conductive layer (CL) formed on the inversion layer-forming region (CH). A charge accumulation film (GD) and a second conductive layer (WL) are stacked on an upper surface and side surface of the first conductive layer (CL), an exposure surface of the inversion layer-forming region (CH), and an upper surface of the accumulation layer-forming regions (ACLa, ACLb) and the second conductivity type regions (S/D, S/D). The second conductive layer (WL) is connected to a word line and second conductivity type regions (S/D, S/D) are connected to bit lines (Bla, BLb).

Non-volatile semiconductor memory device

A semiconductor device enabling word lines to be arranged at close intervals, comprising a plurality of memory transistors arranged in an array and a plurality of word lines serving also as gate electrodes of memory transistors in a same row, extending in a row direction, and repeating in a column direction, where insulating films are formed between the plurality of word lines to insulate and isolate the word lines from each other and where a dimension of separation of word lines is defined by the thickness of the insulating films.

Semiconductor device and method of producing the same

Method of fabricating a memory transistor array utilizing insulated word lines as gate electrodes

Memory transistor array utilizing insulated word lines as gate electrodes

Nonvolatile semiconductor memory device

Growing community of inventors

Kanagawa, Japan

Toshio Terano