Shinko Electric Company, Ltd.

Shimizu Construction Co., Ltd.

Muratec Automation Co., Ltd.

Toshio Takasu

Hiroshi Harada

Shintaro Kobayashi

Takeshi Watanabe

Tsutomu Ishida

Yoshiyuki Iwasawa

Takashi Matsumoto

Kiwamu Yamamoto

Masanao Murata

Tsutomu Shinya

Shigeru Tanaka

Senzou Kyutoku

A transporting system with a fire door () is provided with: a rail () installed within a facility; a transporting carriage (), whose wheel () is set so as to roll over a surface for rolling of the rail; a fire door plate () for segmenting a space within the facility in a direction intersecting the rail at a predetermined position of the rail; and a door plate moving device () capable of moving the fire door plate from an open position for the transporting carriage to pass through the predetermined position, to a close position for the fire door plate to segment the space. A first cut () is formed obliquely with respect to a width direction of the rail when planarly seen on the surface for rolling, in the rail at the predetermined position. The fire door plate has a shape capable of passing through the first cut when being moved to the close position.

Transporting system with fire door, rail apparatus with fire door, and transporting system

There is disclosed a robot used in a clean room and adapted to transport a wafer cassette containing semiconductor wafers. The robot includes: a guide rail disposed in the clean room; a robot body slidably connected to the guide rail for movement along the guide rail; and a first drive mechanism for driving the robot body along the guide rail. The robot body includes: a clamping hand for releasably clamping the wafer cassette; an arm assembly, extending between the guide rail and the clamping hand, for controlling the position of the clamping hand; and a wrist assembly, interposed between the arm assembly and the clamping hand, for adjusting the orientation of the clamping hand. The wrist assembly includes: a wrist frame connected via a horizontal pivot to the arm assembly for upward and downward movement, the wrist frame rotatably supporting the clamping hand for turning about an axis perpendicular to the horizontal pivot; a second drive mechanism for pivoting the wrist frame relative to the arm assembly; and a third drive mechanism for turning the clamping hand relative to the wrist frame.

Transporting robot for semiconductor wafers

There is disclosed a dusttight storage cabinet apparatus used for storing works such as wafer cassettes for containing semiconductor wafers. The storage cabinet apparatus includes: a housing having an entrance, formed in its front wall, for allowing works to come in and go out of the housing therethrough; an air supply duct for supplying the inside of the housing with clean air; a vertical rotation shaft rotatably disposed in the housing for turning about its longitudinal axis; a drive motor for turning the rotation shaft; and a rack assembly of a substantially cylindrical structure. The rack assembly is coaxially secured to the rotation shaft and has a plurality of compartments for storing the works therewithin. The compartments open radially outward and are partitioned off from one another so as to prevent cross contamination by dust among the compartments.

Dusttight storage cabinet apparatus for use in clean rooms

Growing community of inventors

Ise, Japan

Toshio Takasu