Hamamatsu-photonics K.k.

Agfa-gevaert

Toshio Takabayashi

Takuya Homme

Hiroto Sato

Takaharu Suzuki

Yutaka Kusuyama

Kazuhisa Miyaguchi

Kazuhiro Shirakawa

Masanori Yamashita

Yoshio Natsume

Paul Leblans

Harumichi Mori

Masahiko Honda

Yasushi Ohbayashi

Masahiro Suganuma

Comprising a first step of supporting a substrate formed with a scintillator on at least three protrusions of a target-support element disposed on a vapor deposition table so as to keep a distance from said vapor deposition table; a second step of introducing said vapor deposition table having said substrate supported by said target-support element into a vapor deposition chamber of a CVD apparatus; and a third step of depositing an organic film by CVD method onto all surfaces of said substrate, provided with said scintillator, introduced into said vapor deposition chamber.

Scintillator panel

The radiation image conversion panel in accordance with the present invention has an aluminum substrate; an alumite layer formed on a surface of the aluminum substrate; a metal film, provided on the alumite layer, having a radiation transparency and a light reflectivity; a protective film covering the metal film and having a radiation transparency and a light transparency; and a converting part provided on the protective film and adapted to convert a radiation image.

Radiation image conversion panel, scintillator panel, and radiation image sensor

An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate.

Scintillator panel and radiation image sensor

An organic film vapor deposition method includes a first step of supporting a substrate formed with a scintillator on at least three protrusions of a target-support element disposed on a vapor deposition table so as to keep a distance from the vapor deposition table; a second step of introducing the vapor deposition table having the substrate supported by the target-support element into a vapor deposition chamber of a CVD apparatus; and a third step of depositing an organic film by CVD method onto all surfaces of the substrate, provided with the scintillator, introduced into the vapor deposition chamber.

Organic film vapor deposition method

The radiation image conversion panel in accordance with the present invention has an aluminum substrate; an alumite layer formed on a surface of the aluminum substrate; a chromium layer covering the alumite layer; a metal film, provided on the chromium layer, having a radiation transparency and a light reflectivity; an oxide layer covering the metal film and having a radiation transparency and a light transparency; a protective film covering the oxide layer and having a radiation transparency and a light transparency; and a converting part provided on the protective film and adapted to convert a radiation image.

Light-receiving devices are two-dimensionally arranged on a substrate, bonding pads electrically connected to the light-receiving devices in the respective rows or columns via signal lines are arranged on the outer periphery of the substrate, and a protective passivation film is disposed on the light-receiving devices and signal lines, thereby forming a light-receiving device array. On the light-receiving surface of the light-receiving device array, a scintillator made of columnar crystals of CsI is deposited. On the other hand, a resin frame formed like an elongated frame is disposed inside the bonding pads. Inside this frame, a protective film in which an inorganic film is held between organic films made of Parylene is laminated. The outer periphery of the protective film is in close contact with the resin frame with the aid of the coating resin.

Radiation detection device and method of making the same

A scintillator panel () comprises a radiation-transparent substrate(), aflat resin film () formed on the substrate (), a reflecting film () formed on the flat resin film (), a deliquescent scintillator () formed on the reflecting film (), and a transparent organic film () covering the scintillator ().

Scintillator panel, radiation image sensor, and methods of making the same

An image storage screen or panel, suitable for use in applications related with computed radiography, has been disclosed, wherein said screen or panel comprises a binderless needle-shaped stimulable (storage) phosphor and a substrate, characterized in that said substrate has a surface roughness of less than 2 &#x3bc;m and a reflectivity of more than 80%.

Binderless storage phosphor screen

A solid-state imaging elementhaving a light-receiving portion where a plurality of photoelectric conversion elementsare arranged, and electrode padselectrically connected to the photoelectric conversion elementsis mounted on a substratehaving external connection electrodesand electrode padselectrically connected to them. A scintillatoris formed on the surface of the light-receiving portion of the solid-state imaging element. The electrodes padsandare electrically connected by wiring lines. An electrical insulating organic filmtightly seals the scintillatorand covers the electrode padsandand the wiring lines. A metal thin filmis formed on the organic film

Radiation detector and method of manufacture thereof

In a scintillator panel comprising a deliquescent scintillator formed on an FOP and a polyparaxylylene film covering over the scintillator, the FOP comprises a protective film peeling prevention rough at a side wall portion thereon coming into contact with the polyparaxylylene film.

The surfaces of an amorphous carbon substrate of a scintillator panel have undergone sandblasting, and an Al filmserving as a reflecting film is formed on one surface, and a columnar scintillator for converting incident radiation into visible light is formed on the surface of the Al film.

An image sensor assembly is mounted and fixed on a mount substrate with an adhesive, and a light sensitive portion of the image sensor assembly is located so as to reach the vicinity of at least one peripheral region. A moisture-proof protective film to cover a scintillator layer of the image sensor assembly is laid so as to cover the scintillator layer over a side wall to which the light sensitive portion is in proximity, up to the back side of a substrate of the image sensor assembly, and this portion on the back side is sandwiched between the image sensor assembly and the mount substrate so as to be fixed.

Growing community of inventors

Hamamatsu, Japan

Toshio Takabayashi