Murata Mfg. Co., Ltd.

Myrata Mfg. Co., Ltd.

Toshio Ogawa

Atsuo Senda

Tohru Kasanami

Satoshi Shindo

A ferroelectric thin film element 1 constructed by forming a MgO thin film 3 oriented in the direction (100), a lower electrode 4 composed of an alloy thin film of a Ni--Cr--Al system oriented in the direction (100), a ferroelectric thin film 5 composed of a PbTiO.sub.3 thin film oriented in the direction (111), and an upper electrode 6 in this order on a substrate composed of (100) silicon 2.

Ferroelectric thin film element

A ferroelectric thin film element constructed by forming a first electrode composed of an alloy thin film of a Ni-Cr-Al system or Ni-Al system on a substrate and forming a ferroelectric thin film composed of a ferroelectric material having a composition having a spontaneous axis in the direction (111) and having a crystal orientation in the direction (111) on the first electrode composed of a thin film.

Ferroelectric thin film element with (III) orientation

A ceramic electronic component having a structure in which thin film electrodes made of a Ni-Al system alloy or a Ni-Cr-Al system alloy are formed so as to make contact with a functional ceramic thin film.

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Iwata, Japan

Toshio Ogawa