Hitachi, Ltd.

Fuji Jukogyo Kabushiki Kaisha

Hitachi-high-technologies Corporation

Other

Mitsubishi Denki Kabushiki Kaisha

Hitachi High-tech Corporation

Pentax Corporation

Mitsubishi Electric Corporation

Hoya Corporation

Toshio Masuda

Hideyuki Yamamoto

Junichi Tanaka

Akira Kagoshima

Shoji Ikuhara

Hiroyuki Kitsunai

Kazue Takahashi

Mitsuru Suehiro

Atsushi Atake

Tsuyoshi Kobayashi

Kenichi Yamamoto

Naoki Shibata

Akihisa Nakamura

Katsumasa Igarashi

Kenji Hijikata

Masayuki Ushiki

Kouji Kaneda

Minoru Yuki

Tatsuru Fukuda

Masahito Motoi

Satoshi Satomura

Hiroshi Ogiwara

Junzo Shinozuka

Daisuke Shiraishi

Hiroshi Oishi

Yoshio Iwakami

Toyohide Sunaguchi

Munenori Homma

Tatehito Usui

Tetsunori Kaji

Masayuki Honma

Kenji Tamaki

Hiromichi Enami

Hiroshi Kanekiyo

Ichiro Sasaki

Natsuyo Morioka

Saburo Kanai

Toru Otsubo

Go Miya

Katsuya Watanabe

Yoshihiro Satou

Shigeru Shirayone

Satoru Kobayashi

Hideaki Suzuki

Makoto Koizumi

Makoto Mogamiya

Seiichiro Kanno

Takaharu Ueda

Hiroyuki Kawano

Hironobu Kawahara

Takashi Fujii

Tomoaki Hiruta

Naoshi Itabashi

Masayoshi Ishikawa

Tsutomu Tetsuka

Kiyoshi Kawano

Saburou Kanai

Masahiro Shikai

Akihide Shiratsuki

Ryoji Asakura

Ken'etsu Yokogawa

Hiroaki Yoda

Akio Yazaki

Katsuhiko Mitani

Muneo Furuse

Hideshi Fukumoto

Masanori Kadotani

Takashi Mizumori

Kazuo Takashima

Koichi Tsuzuki

Kei Shibayama

Masahiko Inoue

Ryoji Fukuyama

Shiro Nakadaira

Kenshiro Ohtsubo

Tomoyuki Tamura

Tadayuki Kirigaya

Hitoshi Uwabu

Yasuyuki Oikawa

Hideyuki Yamamato

Jyunichi Tanaka

Jun'ichi Tanaka

Shigemi Kanbayashi

Hitoshi Matsuno

Yuichirou Iijima

Osamu Yoshimura

Ken Kikegawa

Yuki Kawae

The purpose of the present invention is to provide a substrate inspection device that increases the flatness of a substrate during inspection, and improves the detection sensitivity of foreign matter. Therefore, the present invention is a substrate inspection device provided with a turntable on which a substrate to be inspected is mounted, and a clamp mechanism that holds the substrate on the turntable. The substrate inspection device is characterized in that the clamp mechanism has an abutting part that moves in an in-plane direction of the substrate and presses the substrate. Preferably, the abutting part contacts or separates from an outer peripheral side surface of the substrate by rotating centered on a rotational axis in an out-of-plane direction of the substrate.

Substrate inspection device

The purpose of the present invention is to allow a clean airflow around a substrate to reliably move downward of the substrate in an examination device in which clean air is supplied to an inspection chamber. This examination device is provided with a rectifying plate (see FIG.A) which covers a part of the upper surface of a stage for mounting a substrate, and is disposed between a gas supply unit and the stage to block an airflow toward the substrate.

Examination device

Selection of sensors requires the knowledge of individual sensors mounted on a target machine and the knowledge of mechanical features of the machine. In the past, experts having mechanical knowledge selected the sensors. The present invention involves analyzing sensor data at e of machine failure, extracting features from the sensor data regarding each failure cause, and comparing the extracted features so as to clarify the difference between the sensor data about the failure causes and present an operator with the clarified difference thereby to support sensor selection. The invention makes it possible to select more simply than before the sensors considered effective for classifying failure causes. For example, the sensors deemed effective for classifying failure causes without mechanical knowledge can be selected.

Failure cause classification apparatus

Among the multiple OES data wavelengths, an analysis device identifies the wavelength of light emissions from a substance contained in the plasma from among multiple light emission wavelengths within the chamber by way of the steps of: measuring the light emission within the chamber during etching processing of the semiconductor wafer; finding the time-based fluctuation due to changes over time on each wavelength in the measured intensity of the light emissions in the chamber; comparing the time-based fluctuations in the wavelength of the light emitted from the pre-specified substance; and by using the comparison results, identifying the wavelength of the light emitted from the substance caused by light emission within the chamber.

Analysis method, analysis device, and etching processing system

The invention provides a plasma processing apparatus aimed at suppressing the corrosion caused by reactive gas and heavy-metal contamination caused by plasma damage of components constituting the high-frequency electrode and gas supply unit. The plasma processing apparatus comprises a processing chamberfor subjecting a processing substrateto plasma processing, gas supply meansandfor feeding gas to the processing chamber, and an antenna electrodefor supplying high-frequency radiation for discharging the gas to generate plasma, wherein the gas supply means includes a gas shower platehaving gas discharge holes on the surface exposed to plasma, and a portion of or a whole surface of the conductorexposed to gas constituting the antenna-electrode side of the gas supply means is subjected to ceramic spraying containing no heavy metal to form a protecting film

Plasma processing apparatus

The present invention provides a driving force control unit for a vehicle having an accelerator opening degree detecting unit for detecting accelerator opening degree, a driving condition detecting unit for detecting engine driving condition, a driving force setting unit for setting a driving force indication value according to a plurality of different driving force characteristics based on the accelerator opening degree and the engine driving condition, a selector for selecting a driving force characteristic from the plural of different driving force characteristics by manipulation. The driving force setting unit setting the driving force indication value according to the selected driving force characteristic.

Driving force control unit for vehicle

In a sliding door apparatus, a first entrance is opened and closed by a first door, and a second entrance that faces the first entrance is opened and closed by a second door. Imaging means that captures images across a space between the first entrance and the second entrance is disposed beside the space. An image processing and determining portion determines presence or absence of an obstruction inside the space based on image data from the imaging means.

Sliding door apparatus and elevator including an obstruction detection system

The present invention provides a vehicle display device which allows a driver to instantaneously grasp driving force information. A meter_ECU displays a driving force display image which displays driving force information of a vehicle on an MID, displays an acceleration-torque line (driving force characteristic line) L corresponding to the currently selected mode M and, at the same time, changes a power level which is indicated in a power display region P set within the acceleration-torque line L interlockingly with an accelerator operation of a driver. Due to such a constitution, the vehicle display device allows the driver to instantaneously grasp the driving force information.

Vehicle display device

The present invention provides a vehicle display device which can display fuel consumption information of a vehicle in a useful and optimum mode for a driver. A meter_EUC calculates an instantaneous fuel consumption of a vehicle based on a mileage and a fuel injection quantity within a set time, calculates an average fuel consumption of the vehicle based on respective cumulative values of the mileage and the fuel injection quantity repeatedly calculated for every set time, and displays the deviation of the instantaneous fuel consumption with respect to the average fuel consumption as fuel consumption information on a fuel consumption meter. The display on the fuel consumption meter is performed by swinging a pointer with respect to a neutral position. When the deviation takes a positive value, the pointer is swung in the pulse direction with a swinging width corresponding to the deviation quantity, while when the deviation takes a negative value, the pointer is swung in the minus direction with a swinging width corresponding to the deviation quantity.

The driving force control unit for a vehicle comprises a plurality of control modes for controlling a driving force, each of control modes having each driving force characteristic, a vehicle driving condition detecting unit for detecting a vehicle driving condition, a selector for selecting one control mode from the control modes, a temporary selector for changing the current mode to other mode, and a driving force indication value setting unit for setting a driving force indication value according to the vehicle driving condition and the driving force characteristic corresponding to the selected mode by the selector or the temporary selector.

Driving force control unit for a vehicle

The driving force control unit comprises a plurality of control modes for controlling a driving force, each of control modes having each driving force characteristic; a vehicle driving condition detecting unit for detecting a vehicle driving condition; a selector for selecting one control mode from the plurality of control modes; a driving force setting unit for setting a driving force indication value according to the driving force characteristic selected by the selector based on the vehicle driving condition; and a shift lever position detector for detecting a shift lever position of a transmission. The control mode includes a reverse control mode having a reverse driving force characteristic suitable for traveling the vehicle in reverse direction. The driving force setting unit changes the control mode to the reverse control mode when the shift lever is detected in a position of a reverse range, and sets the driving force indication value according to the reverse driving force characteristic.

A plasma processing apparatus includes a vacuum vessel with a sample stage having a mounting surface disposed in a process chamber, and a plate having substantially uniform thickness and electric power applied thereto constituting a ceiling of the chamber. The plate is disposed opposite to and substantially parallel with the sample stage so as to cover the whole area of the stage mounting surface and has a through-hole therein. An optical transmitter with a diameter larger than a diameter of the though-hole is disposed inside of the vacuum vessel and has an end face at a position above and spaced a small distance a back surface of the plate so as to receive light from the chamber via the through-hole. The optical transmitter is independently detachable with respect to the back surface of the plate.

Plasma processing system and apparatus and a sample processing method

A plasma processing system includes a first unit for plasma-processing a sample based on a recipe for plasma processing, and a second unit for modifying the recipe in accordance with a monitored value obtained during the plasma processing of the sample in the first unit. A next sample is plasma processed in the first unit based on the modified recipe.

Disturbance-free, recipe-controlled plasma processing system and method

A driving force control device can set driving force characteristics which conform to tastes of drivers using one vehicle thus giving the easy-to-drive feeling to the drivers. An E/GECU possesses three modestoas control modes and selects one mode from these modes based on a manipulation input using a mode selection switch. Further, any one of the mode out of these modestois preset in the E/GECU as a temporary changeover mode, and the E/GECU changes over a mode selected by the mode selection switch and the preset temporary changeover mode alternatively by the temporary changeover switch.

Driving force control device of vehicle

A portable imaging device has a memory which stores a device image. This device image shows a part of an outside of the portable image device itself including a plurality of selectable portions relating to the control members of the portable image device. The device image is read and is indicated on the LCD of the portable image device. With the portable image at least one of characters is indicated on the LCD. The characters correspond to selectable portions. One of the selectable portions is selected as a selected portion. The selected portion is distinguished from other selectable portion by the characters. The function relating to the selected portion is indicated on the LCD.

Portable imaging device including display containing function explanation

Growing community of inventors

Toride, Japan

Toshio Masuda