Tdk Corporation

Toshio Kubota

Masao Yamaguchi

Fujimi Kimura

Kanji Kobayashi

Tetsuo Miyazaki

Shinya Yoshihara

Jun Kudo

Takehiro Horinaka

Masumi Sugawara

Satoshi Kurimoto

Hiroshi Shindo

Shingo Kamata

Satoru Takeshima

A gas at an extremely low temperature is jet-sprayed onto a warped concave surface of a wafer to correct this warped concave surface flat.

Method for controlling flatness of wafer and manufacturing method of thin-film magnetic head

The present invention relates to a film thickness measuring method measuring a film thickness of an element formation layer formed on a substrate and its object is to provide a film thickness measuring method which can measure a residual film thickness of a polishing object film in a polishing process at a high accuracy. In a fabrication method of a thin film magnetic head, alumina is coated over a dummy layer and a bottom shielding layer after forming the dummy layer along with the bottom shielding layer and a planarized layer is formed by polishing the surface thereof using a CMP. Next, after forming a top shielding layer over the bottom shielding layer , a planarized layer is form by embedding alumina. A film thickness of an embedded on the dummy layer is measured by a non-contact optical film thickness measuring equipment and a film thickness of the top shielding layer is measured based on the film thickness.

Film thickness measuring method, polishing method, fabrication method of thin film magnetic head and substrate for forming the thin film magnetic head

This invention relates to a polishing method for polishing a surface of a material to be polished and a fabrication method of a thin film magnetic head having a planarization process for planarizing the surface of the material to be polished by polishing, and an object thereof is to reduce variations of a residual film thickness on the surface of a material to be polished after polishing. An insulating film is formed on an AlTiC substrate and a bottom shielding layer is formed thereover. After forming a coating layer and etching a mask layer as an etching mask, a protruding portion of the coating layer at the bottom of the opening of the mask layer is removed by a desired thickness. Since a protruding portion of the coating layer on the periphery of the opening of the mask layer is suitably undercut, the protruding portion is shaved, thereby obtaining the coating layer which is planarized as a whole.

Polishing method and fabrication method of thin film magnetic head

An abrasive slurry contains an alumina grain, an inorganic salt, a water-soluble chelating agent, an abrasive oil and a hardly water-soluble chelate aluminum salt or chelate nickel salt. The alumina grain has an average particle diameter of from 0.05 to 1 &mgr;m in an amount of from 0.1 to 10% by weight. The inorganic salt is selected from the group consisting of water-soluble inorganic aluminum salt and nickel salt in an amount of from 0.1 to 3% by weight. The content of the water-soluble chelating agent is from 0.1 to 3% by weight. The content of the abrasive oil is from 0.1 to 10% by weight. The content of the hardly water-soluble chelate aluminum salt or chelate nickel salt is not more than 0.1% by weight. The abrasive slurry is used for abrading an insulation layer of a semiconductor integrated circuit and a magnetic thin film head while they are produced.

Abrasive slurry and preparation process thereof

A cleaning apparatus includes a cleaning tank for reserving cleaning fluid, an object to be cleaned being immersed in the cleaning fluid, a vibrator for vibrating the cleaning fluid in the cleaning tank, and two micro-vibration sources for minutely vibrating the object to be cleaned in two different directions.

Cleaning apparatus and method

A method for manufacturing a flying type magnetic head slider includes an ion etching step for shaping a surface of the slider facing to a magnetic information medium to form a predetermined pattern by using an ion etching method, a step of forming a protection layer of an organic material to cover at least one face of the slider on which at least one electromagnetic transducer element is formed, by injecting the organic material to the at least one face of the slider from a ink jet type printer head, and a step of removing the protection layer of the organic material. The protection layer forming step is executed before the ion etching step, whereas the protection layer removing step is executed after the ion etching step.

Method for manufacturing a flying magnetic head slider

The present invention is directed to stabilize the flying height at a constant level and prevent head crashes. Indented portions 104 and 105 are formed shorter than rail portions 101 and 102. Rear rail surfaces 113 and front rail surfaces 112 are formed at the slider 1 with middle rail surfaces 111 formed between them. The rear rail surfaces 113 and the front rail surfaces 112 each include a first surface (L1) whose surface width is determined by the entire width W01 or W02 of the rail portion 101 or 102 and a second surface (L3) whose surface width is gradually reduced starting from the surfaces width W01 or W02 of the first (L1) toward the surface width W11 or W12 of the middle rail surfaces 111. The requirements, i.e., L1.ltoreq.2.5% of L0 and L1&lt;L2.ltoreq.15% of L0 are satisfied for the length L1 of the first surfaces (L1), the length L2, that includes the first surfaces (L1) and the second surfaces (L3) and the entire length L0 of the rail portions 101 and 102.

Machined magnetic head with contoured air bearing surfaces

The slider is provided with at least one rail portion which extends between the trailing end portion and the leading end portion on one surface of the slider body. At least one magnetic transducer is provided on a line extended from the rail portion toward the trailing end of the slider body. The rail portion is provided with indented rail portions formed along the two sides and the rail surface, excluding the indented rail portions, forms the air bearing surface. The indented rail portions are formed shorter than the rail portion so that the air bearing surface continues all the way to, at least, the trailing end portion of the slider body. The width of the air bearing surfaces, which are cut into by the indented rail portions, is maintained at approximately the same dimension over the entire length of the indented rail portions. This reduces dependency of the flying height and flight attitute on the skew angle and, at the same time, prevents minute particles from the slider, generated through dry etching, from adhering to the side surfaces. Magnetic head elements are manufactured from a magnetic head aggregate which includes a section of a wafer to be formed into magnetic head elements, each magnetic head element comprising a slider body and at least one transducer, wherein the at least one transducer for each magnetic head element is formed at a trailing end of the magnetic head aggregate by fabricating a thin film element which is integrated with the slider body. A mask is placed over the magnetic head aggregate with openings through which the slider bodies are etched to form the indented rail portions. Finally, the magnetic head aggregate is machined to create the indented center portions and indented side portions, and the magnetic head aggregate is cut into plural magnetic head elements.

Growing community of inventors

Tokyo, Japan

Toshio Kubota