Asahi Kasei Kabushiki Kaisha

Toshio Kitada

Naoto Ito

Hidenari Kiguchiya

In a so-called step-and-repeat method in which a mask pattern is circumferentially written by exposure onto each predetermined region on a surface of a roller mold, an object of the present invention is to improve the spacing accuracy between the mask patterns and to suppress the occurrence of misalignment at a seam when the mask pattern has been written onto a 360-degree circumference. For that object, a roller mold manufacturing apparatus according to the present invention comprises: a maskhaving a function of transmitting part of an irradiating substance; a rotational drive apparatus that rotates a roller moldaround a rotational shaft; a rotation amount detection sensor that detects an amount of rotation; a control apparatus that sends a control signal for adjusting a circumferential position of writing onto a resist of the roller mold with the irradiating substance; and an actuatorthat moves the masklinearly, wherein a predetermined area is irradiated with the irradiating substance in a state where rotation of the roller moldis stopped, the roller moldis then rotated by a predetermined amount and stopped, and a circumferential position of writing is adjusted for irradiating another predetermined area with the irradiating substance.

Roller mold manufacturing apparatus and method

A phenomenon where a depicted pattern becomes unclear owing to a rotational runout of a roller mold in the direction of a rotary shaft is suppressed while restraining an increase in the cost. For the purpose of achieving the above, a roller mold manufacturing device () is provided with an electron beam irradiation device (); a mask () which has an opening that allows passage of some of electron beams, and which forms a plurality of beams that perform simultaneous depiction on a resist; a rotation drive device () which rotates a roller mold () around a rotary shaft (); a displacement amount detection sensor () which detects a rotational runout displacement amount of the roller mold () in the direction of the rotary shaft (); a control device (); and an actuator () which, based on a control signal from the control device (), allows a depiction position by the electron beams to follow the displacement of the roller mold () in the direction of the rotary shaft (), wherein misalignment of an exposed position of the resist, which is caused by rotational runout displacement of the roller mold () in the direction of the rotary shaft (), is suppressed.

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Tokyo, Japan

Toshio Kitada