The Japan Steel Works, Ltd.

Osaka University

Showa Optronics Co., Ltd.

Toshio Inami

Hideaki Kusama

Ryosuke Sato

Ryotaro Togashi

Naoyuki Kobayashi

Takahisa Jitsuno

Yasuhiro Yamashita

Keiu Tokumura

Tomonari Yahata

Yoshiaki Aida

Tatsumi Goto

A laser irradiation method sets scan lines in an x direction in parallel, and in a y direction to be separate by an inter-scan-line distance Py corresponding to laser irradiation areas of a processing target object, orients a length direction of a linear laser spot with length Wy and width Wx in the y direction, and irradiates target object with the laser spot in each of irradiation positions arranged at width direction intervals &#x39b; while moving the laser spot relative to the target object along the scan lines. The method includes determining the inter-scan-line distance Py, the width direction interval &#x39b;, and a position shift quantity &#x394;x (where, 0&#x3c;&#x394;x&#x3c;&#x39b;) so that the irradiation positions on adjacent scan lines are shifted in the x direction by the position shift quantity &#x394;x and a cumulative value of the applied laser intensity is substantially equalized.

Laser irradiation method and apparatus

A laser optical system using optical fiber transmission, includes a first optical fiber for transmitting laser light emitted from a laser oscillator, a collimator lens for collimating laser light emitted from the first optical fiber, a spherical array lens including a plurality of cells for converging laser light emitted from the collimator lens into a plurality of spots, a plurality of second optical fibers each having a smaller core diameter than the first optical fiber and configured to admit the laser light converged into the corresponding spot by the spherical array lens, the second optical fibers having output ends that have mutually parallel axial lines and are arranged linearly in a single row, and a linearization optical unit for shaping laser light emitted from the second optical fibers into laser light having a linear cross section at an illuminated surface.

Laser optical system using optical fiber transmission

A laser crystallization method in which an amorphous silicon thin filmformed on a substrateis irradiated with a laser beam, the method including the steps of providing the amorphous silicon thin filmwith an absorbent to form an absorbent layeron the desired specific local areas of the amorphous silicon thin filmand laser annealing for crystallizing the specific local areas of the amorphous silicon thin filmby irradiating the amorphous silicon thin filmincluding the specific local areas with a semiconductor laser beam L having a specific wavelength absorbable by the absorbent layerand unabsorbable by the amorphous silicon thin filmfor heating the absorbent layer

Laser crystallization method for amorphous semiconductor thin film

A first laser beam () and a second laser beam () composed of an ultraviolet laser are irradiated from a side of a second glass member (), allowing the first laser beam () to pass through the second glass member () so as to condense the first laser beam () on the first glass member () to form a first scribe line (), condensing the second laser beam () on the second glass member () to form a second scribe line (), and applying a break force to the first scribe line () and the second scribe line () to cut the glass.

Method of cutting laminated glass with laser beams

Growing community of inventors

Kanagawa, Japan

Toshio Inami