Nagoya University

Fuji Machine Mfg. Co., Ltd.

Toshimitsu Watanabe

Masaru Hori

Hiroyuki Kano

Joji Isozumi

Nobuyuki Nakane

Akihiro Kawajiri

Kazuaki Mori

Naofumi Yoshida

Tetsunori Kawasumi

A reactive-species supply device is configured to supply a treatment gas to an electric discharge space, for thereby supplying at least a reactive species formed in a plasma, to an object. The reactive-species supply device includes (a) at least one pair of electrodes configured to form the electric discharge space and (b) an electrode protection device configured to protect the electrodes from the treatment gas. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.

Reactive-species supply device and surface treatment apparatus

A reactive-species supply device is configured to supply a treatment gas to an electric discharge space that is formed by at least one pair of electrodes, for thereby supplying at least a reactive species formed in a plasma, to an object through a reactive-species output port. The reactive-species supply device includes (a) a reactive-species outlet passage disposed between the electric discharge space and the reactive-species output port and (b) an earth ground member disposed in a portion of the reactive-species outlet passage. The portion of the reactive-species outlet passage is distant, by a given distance, from the reactive-species output port. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.

Growing community of inventors

Chiryu, Japan

Toshimitsu Watanabe