Sinfonia Technology Co., Ltd.

Toshimitsu Morihana

Mitsuo Natsume

Yasushi Taniyama

Mitsutoshi Ochiai

Masahiro Osawa

Yuki Matsumoto

A purging nozzle unit of a gas supply device according to the present invention including: a housing that is capable of passing a predetermined gas so as to replace the internal atmosphere of a FOUP with the predetermined gas; a nozzle coming into intimate contact with the proximity of a port that is provided on one face of the FOUP, the nozzle being pressed to thereby open the port; an operation adjustment space configured to increase or decrease so as to operate the nozzle between a use posture in which the predetermined gas can be supplied into the target container via the port and a standby posture in which the predetermined gas cannot be supplied into the target container via the port; and a gas introducing part configured to export or import compression air relative to the operation adjustment space to thereby control an operation of the nozzle.

Gas supply device, method for controlling gas supply device, load port, and semiconductor manufacturing apparatus

There is provided a load port provided to a loading/unloading port of a semiconductor-processing apparatus to transfer a semiconductor wafer, including: a FOUP support configured to support a FOUP that includes a FOUP lid and move the FOUP in a front-rear direction with respect to the loading/unloading port; a lid configured to open and close the loading/unloading port; a FOUP lid sensor provided to perform a detection operation between a position of the lid in a closed state and a position of the FOUP lid when unloading is normally completed by retreating the FOUP by a predetermined distance with respect to the loading/unloading port; and an observer configured to observe that the FOUP lid sensor has performed the detection operation after the unloading is completed.

Load port and method of detecting abnormality in FOUP lid of load port

There is provided an end structure of a nozzle () including a gas-flow passage () communicable with an opening () provided through a bottom of a container () configured to contain an object, the nozzle () configured so that gas is injected into or discharged from the container () through the gas-flow passage () and the opening (). The end structure includes a contact portion () provided at an upper end portion of the nozzle () and around the gas-flow passage (), and the contact portion () is configured to be brought into contact with a contacted portion () provided around the opening (). The contact portion () includes a flat portion () and protruding portions (and) each protruding upward relative to the flat portion (), and the flat portion () is made of material softer than that of the protruding portions (and).

End structure of nozzle, purging device, and load port

The left-right span between a light projection sectionand a light receiving sectionof a mapping sensorhaving an optical axis Lextending in a left-right horizontal direction is arranged to be narrower than the span of a front opening of a open cassettewhich is a smaller one of differently-sized containers conveyed to a load port, and the mapping sensor is attached to a mapping device. A first protrusion sensorhaving an optical axis Lextending in the left-right horizontal direction is attached to the mapping deviceto be separated from the mapping sensorin a moving direction of the mapping sensor. Furthermore, a second protrusion sensorhaving an optical axis extending in the up-down moving direction of the mapping sensoris provided.

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Tokyo, Japan

Toshimitsu Morihana