Murata Manufacturing Co., Ltd.

National Institute of Advanced Industrial Science and Technology

Toshimi Nagase

Keiichi Umeda

Morito Akiyama

Keiko Nishikubo

Atsushi Honda

Masato Uehara

Takaaki Mizuno

Yasuhiro Aida

A gallium nitride structure that includes: a substrate; a gallium nitride layer opposed to the substrate and containing gallium nitride as a main component thereof; and a first electrode between the gallium nitride layer and the substrate. The first electrode includes at least one hafnium layer containing a single metal of hafnium as a main component thereof, and the at least one hafnium layer is in contact with the gallium nitride layer.

Gallium nitride structure, piezoelectric element, method of manufacturing piezoelectric element, and resonator using piezoelectric element

A piezoelectric thin film composed of aluminum nitride and which contains magnesium and 31 to 120 atomic percent of niobium relative to 100 atomic percent of the magnesium, and the total content of the magnesium and the niobium relative to the total sum of contents of the magnesium, the niobium and the aluminum nitride falls within the range of 10 to 67 atomic percent.

Piezoelectric thin film, manufacturing method therefor, and piezoelectric element

A germanium-containing aluminum nitride piezoelectric film and a method for manufacturing an aluminum nitride piezoelectric film in which a germanium-containing aluminum nitride piezoelectric film is grown on a substrate by sputtering.

Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film

A piezoelectric thin film comprising aluminum nitride containing magnesium and hafnium, wherein a content of the hafnium based on 100 atomic % of the magnesium is 8 atomic % or more and less than 100 atomic %, and a total content of the magnesium and hafnium based on a sum of a content of the magnesium, hafnium, and aluminum is in a range of 47 atomic % or less.

Growing community of inventors

Tosu, Japan

Toshimi Nagase