Edwards Japan Limited

Toshiki Yamaguchi

Manabu Nonaka

Yasushi Maejima

Yoshinobu Ohtachi

Tsutomu Takaada

A vacuum pump is provided with which, even in the event of breakage of a rotor blade, broken pieces of the rotor blade are unlikely to scatter from an outlet port. A vacuum pump includes a rotor blade configured to rotate about a vertical axis and a casing housing the rotor blade, and is configured to exhaust sucked gas in a radial direction of the rotor blade by rotation of the rotor blade. An outlet port for the gas is provided at a position that is offset from a position of a gas exit portion of the rotor blade in a direction of the vertical axis.

Vacuum pump

Provided is a vacuum pump suitable for preventing the backflow of a particle from the vacuum pump toward a vacuum chamber. The vacuum pump includes a turbomolecular pump portion exhausting gas molecules by a rotor blade and a stator blade, and a thread groove pump portion provided downstream of the turbomolecular pump portion and exhausting the gas molecules by a thread groove flow path formed by a cylindrical rotary component (cylindrical portion) and a cylindrical stator component (thread groove pump portion stator) provided on an outer periphery of the cylindrical rotary component, wherein a bounce back prevention means for preventing a particle from bouncing from the thread groove pump portion back toward the turbomolecular pump portion is provided downstream of the turbomolecular pump portion.

Vacuum pump and stator component of thread groove pump portion of the vacuum pump

A vacuum pump includes a rotor that has a rotor central portion and a plurality of stages of rotor blade portions extending from the rotor central portion and having a predetermined elevation angle, and a casing that houses the rotor therein. The rotor further includes a rotor fin. The rotor fin includes a fin shaft portion connected to an end of the rotor central portion, and a transfer blade that extends from the fin shaft portion and causes particles to bounce back in a direction toward an outer periphery of the rotor, the particles falling onto the abovementioned end through an inlet port. The height of the transfer blade and the number of transfer blades are set based on the fall velocity of the particles and the rotation speed of the rotor, such that the particles are prevented from falling onto the abovementioned end without colliding with the transfer blade.

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Chiba, Japan

Toshiki Yamaguchi