Shimadzu Corporation

Toshiki Yamaguchi

Junichiro Kozaki

Yoshihiro Nagano

Masaki Ohfuji

Takuto Onishi

A vacuum pump includes a rotor shaftthat is rotatably supported by a bearing and driven by a motorto rotate at a high speed, and a rotorthat is fastened to one end of the rotor shaftin axial direction thereof and is provided with an evacuating function portion. An engagement portion, in which the rotor shaftand the rotorare fastened, includes an engagement holeformed on one of the rotor shaftand the rotorand an engagement shaftformed on the other of the rotor shaftand the rotor. A filling memberis provided in a gap between the engagement holeand the engagement shaft, having shear strength lower than respective shear strengths of the rotorand the rotor shaft

Vacuum pump

The provision of the components requiring cooling on top of the cooling mechanism enables the cooling efficiency to be increased. Furthermore, a case of a control device is attached to the cooling mechanism whereon the components requiring cooling are disposed. The cooling mechanism fulfills the role of the contact surface of the case of the control device with the turbomolecular pump main unit, where the case does not have a case panel on the contact surface with the turbomolecular pump main unit. The cooling mechanism fulfills the role of one surface of the case for the control device, where the cooling mechanism is structured integrally with the control device. Additionally, the turbomolecular pump main unit, the cooling mechanism, and the control device are structured integrally by the turbomolecular pump main unit and the cooling mechanism being in contact.

Turbomolecular pump

A turbo-molecular pump includes a base; a rotorrotatably supported thereon; a statordisposed around the rotor; and a tubular casingconfigured to accommodate the stator. The statorincludes multiple stages of stator bladesand spacersalternately stacked one upon another on a flange surfaceof the base. At least one of the spacersis provided with a circular ring partcontinuously formed thereof covering the outer circumferential surface of other spacersinside the casing

Growing community of inventors

Kawanishi, Japan

Toshiki Yamaguchi