Canon Kabushiki Kaisha

Sony Corporation

Sony Group Corporation

Toshiki Ito

Tatsuya Suzuki

Shiori Yonezawa

Youji Kawasaki

Takeshi Honma

Keiko Chiba

Timothy Brian Stachowiak

Chieko Mihara

Weijun Liu

Natsuhiko Mizutani

Niyaz Khusnatdinov

Takako Yamaguchi

Kenichi Iida

Yasuhisa Inao

Fen Wan

Yasuhiro Sekine

Hitoshi Sato

Keiichi Yoshioka

Kenji Yamada

Kazuhiro Yamauchi

Yukio Hanyu

Takashi Yoshida

Akio Kashiwazaki

Junichi Seki

Tomohiro Saito

Atsunori Terasaki

Wataru Kubo

Makoto Ishii

Hiroshi Kurosawa

Hidetoshi Tsuzuki

Yoshimasa Araki

Jun Kato

Keiji Yamashita

Isao Kawata

Keita Sakai

Tomonori Otani

Akiko Iimura

Kazumi Iwashita

Naoko Matsufuji

Naoki Kiyohara

Motoki Okinaka

Kenji Kitagawa

Kanae Kawahata

Yohei Murayama

Yuichiro Oguchi

Akira Terao

Tetsuya Mitani

Chikako Kido

Yuto Ito

Zhengmao Ye

Kiyohito Yamamoto

Norishige Kakegawa

Masayuki Tanabe

Kenichi Akashi

Naoko Kumagai

Takehiko Ueno

Shingo Ishida

Takashi Arai

Toshiaki Ando

Mamiko Kumagai

Kenichi Ueyama

Kyoko Kumagai

Masayuki Nakajima

Kouhei Nagane

An imprint mold having an imprint surface that comes into contact with a curable composition on a substrate, the imprint mold includes a concavo-convex pattern formed on the imprint surface of the imprint mold, and a first step portion that has a first surface having a depth of 0.5 times or more and 2 times or less a depth of the concavo-convex pattern in an outer peripheral portion of an area where the concavo-convex pattern is formed.

Imprint mold, imprint method, and manufacturing method of article

The method for fabricating pattern of a cured product includes a first step (arranging step) of arranging a layer formed of a liquid film of a curable composition (α1) containing at least a component (A1) serving as a polymerizable compound on a substrate and a second step (dispensing step) of dispensing liquid droplets of a curable composition (a2) containing at least a component (A2) serving as a polymerizable compound discretely onto a layer formed of a composition (α1') of components of the curable composition (α1) except a component (D1) serving as a solvent, in which: the mixing of the composition (α1′) and the curable composition (α2) is exothermic.

Method for fabricating pattern of cured product and methods for manufacturing optical component, circuit board and quartz mold replica as well as coating material for imprint pretreatment and cured product thereof

A film formation device for forming a film of a composition on the substrate by irradiating the composition on the substrate with light, includes an optical modulation unit for forming a distribution of an integrated light amount of the light on the substrate, and a control unit for controlling the optical modulation unit, in which the control unit controls the distribution of the integrated light amount of the optical modulation unit on the basis of residual film ratio characteristics of the composition and at least one of a curved shape of an imaging plane of an original template used in a subsequent process and a surface shape of a base film formed on the substrate.

Film formation device, film formation method, and article manufacturing method

A curable composition containing a polymerizable compound (a), a photopolymerization initiator (b), and a solvent (c), wherein the curable composition has viscosity of not less than 2 mPa·s and not more than 60 mPa·s at 23° C., a content of the solvent (d) with respect to the whole curable composition is not less than 5 vol % and not more than 95 vol %, a boiling point of the solvent (d) at normal pressure is less than 250° C., and the polymerizable compound (a) contains a compound (a-1) containing not less than one aromatic ring or aromatic heterocycle, and not less than four vinyl groups directly bonding to the aromatic ring or the aromatic heterocycle.

Curable composition, film forming method and article manufacturing method

An object is to provide a photo-curable composition having high dry etching resistance and high thermal stability. A photo-curable composition includes at least a polymerizable compound and a photopolymerization initiator, and further includes at least one of a flame retarder and a flame-retardant polymerizable compound.

Photo-curable composition and methods for preparing cured film, optical component, circuit substrate, electrical component and replica mold using the same

A substrate surface planarization method includes an arranging step of arranging a liquid curable composition onto a substrate surface having unevenness, a waiting step of waiting until the surface of the layer of the liquid curable composition becomes smooth, and a light exposure step of applying light to cure the layer of the liquid curable composition in this order. The arranging step includes a first arranging step of arranging a layer made of a first liquid curable composition (A1) containing at least a polymerizable compound (a1), and a second arranging step of arranging droplets of a second liquid curable composition (A2) containing at least a polymerizable compound (a2) onto the layer made of the first liquid curable composition (A1) by dropping the droplets discretely.

Planarization method and photocurable composition

Provided is a medical control apparatus including: a processing unit configured to cause one or both of a first display region in which an object relating to an input source of an image is to be displayed and a second display region in which an object relating to an output destination of an image is to be displayed and a third display region in which an object for controlling the input source or the output destination is to be displayed, to be displayed in one screen.

Medical control system and method that uses packetized data to convey medical video information

A three dimensional manufactured product is manufactured A speed of filing an uncured light curing resin in a space for a next layer is enhanced, to improve a manufacturing speed. One surface of a container housing a light curing resin is configured by a gas-permeable sheet that faces the light curing resin, and transmits irradiation light of a light irradiating apparatus, and a light transmitting plate disposed at an outer side of the container from the gas permeable member. A pressurizing chamber controllable in pressure by a pressure controlling apparatus is defined between the gas-permeable sheet and the light transmitting plate. At moving a manufacturing stage, an inside of the pressurizing chamber is de-pressurized to cause the gas-permeable sheet to perform concave surface deformation, and at a time of performing light irradiation, gas in the pressurizing chamber is caused to permeate into the light curing resin by pressurizing.

Three dimensional manufacturing apparatus and method for manufacturing three dimensional manufactured product

An object is to provide a photo-curable composition having high dry etching resistance and high thermal stability. A photo-curable composition includes at least a polymerizable compound (A) and a photopolymerization initiator (B), and further includes at least one of a flame retarder (E) and a flame-retardant polymerizable compound (F).

A method for manufacturing a cured product pattern of a curable composition includes the steps of, in sequence, depositing a droplet of the curable composition onto a substrate; bringing a mold having an uneven pattern formed in a surface thereof into contact with the curable composition; curing the curable composition; and releasing a cured product of the curable composition from the mold. The mold has a recess having a bottom surface and a stair structure arranged to form an opening surface that becomes wider from the bottom surface toward the surface of the mold. In the contact step, the curable composition comes into contact with the stair portion after a top of the droplet comes into contact with the bottom surface.

Method for manufacturing cured product pattern, method for manufacturing processed substrate, method for manufacturing circuit board, method for manufacturing electronic component, and method for manufacturing imprint mold

Provided is a method of producing a cured product pattern, including: a first step (arranging step) of arranging a layer formed of a curable composition (&#x3b1;') that is the components of the curable composition (&#x3b1;) except the component (D) serving as a solvent on a substrate; and a second step (applying step) of applying droplets of a curable composition (&#x3b1;) discretely onto the layer formed of the curable composition (&#x3b1;), the curable composition (&#x3b1;) having a number concentration of particles each having a particle diameter of 0.07 &#x3bc;m or more of less than 2,021 particles/mL, and the curable composition (&#x3b1;&#x2032;) having a surface tension larger than that of the curable composition (&#x3b1;).

Method of forming pattern of cured product as well as production methods for processed substrate, optical component, circuit board, electronic component, imprint mold and imprint pretreatment coating material

A pattern forming method comprises dispensing a curable composition onto an underlayer of a substrate; bringing the curable composition into contact with a mold; irradiating the curable composition with light to form a cured film; and separating the cured film from the mold. The proportion of the number of carbon atoms relative to the total number of atoms in the underlayer is 80% or more. The dispensing step comprises a first dispensing step of dispensing a curable composition (A1) substantially free of a fluorosurfactant onto the underlayer, and a second dispensing step of dripping a droplet of a curable composition (A2) having a fluorosurfactant concentration in components excluding a solvent of 1.1% by mass or less onto the curable composition (A1) discretely.

Pattern forming method

Pattern forming method includes, for each shot area group (SAG) in the following order: discretely dropping curable composition droplets to layer the droplets on a plurality of shot areas included in a certain SAG on substrate; waiting for a time of (m&#x2212;m)&#xd7;Td, where Td is a time for the dropping on one shot area, m is the number of shot areas included in the certain SAG, and mis the maximum value of m; and imprinting in order that the dropping is performed on the plurality of shot areas. The time Td and a time Ti for the imprinting on one shot area are equal to each other. The number of shot areas included in at least one SAG is different from the number of shot areas included in another at least one SAG. In the waiting, the dropping and the imprinting are not performed.

An imprint mold includes a mesa portion projecting from a base material. The mesa portion includes a contact surface configured for contact with a curable composition made of an organic material, and a surface of a side wall at which the contact surface projects from the base material. A liquid repellent surface is formed on at least the surface of the side wall, the liquid repellent surface having a contact angle with respect to the curable composition being higher than a contact angle of the contact surface. The liquid repellent surface includes at least one type of compound selected from the group consisting of an oxide of an inorganic element, a fluoride of an inorganic element, and a nitride of an inorganic element.

Imprint mold, manufacturing method thereof, and imprint method

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Kawasaki, Japan

Toshiki Ito