Ebara Corporation

Hitachi High-tech Corporation

Toshikazu Kawahara

Hiromi Fujita

Yoshihiro Ota

Shigeki Sukegawa

The purpose of the present invention is to provide a recipe creation device, with the goal of using past recipe data in order to highly efficiently create recipes. As an embodiment with which to achieve this goal, there is provided a recipe creation device comprising an arithmetic processing device that, on the basis of design data for a semiconductor element, establishes measurement conditions or inspection conditions by a semiconductor measurement device or a semiconductor inspection device, wherein the arithmetic processing device is configured to be able to access a database in which the measurement conditions or inspection conditions, and the pattern information of the semiconductor element, are stored in associated form, and the measurement conditions or inspection conditions are selected through a search using pattern information of the semiconductor element.

Recipe creation device for use in semiconductor measurement device or semiconductor inspection device

An object of the present invention is to improve the capability of lifting a substrate with the polishing performance of the substrate maintained. A polishing apparatusincludes a polishing tableto which a polishing padfor polishing a substrateis attached, a liquid feeding section configured to feed a liquidto a polishing surface of the polishing pad, a top ringconfigured to suck and convey the substratefrom the polishing surface, the substratebeing disposed on the polishing surface via the liquidfed by the liquid feeding section, and a control section configured to inject a fluid (N) into an internal areaof the liquidinterposed between the substrateand the polishing pad

Growing community of inventors

Tokyo, Japan

Toshikazu Kawahara