Jeol Ltd.

Other

Joel Ltd.

Toshikazu Honda

Katsushige Tsuno

Toshikatsu Kaneyama

Masami Terauchi

Michiyoshi Tanaka

Kenji Tsuda

Takeshi Tomita

Mikio Naruse

Masaki Takeguchi

Ikuya Nishimura

Yu Ishibashi

An omega energy filter capable of increasing energy dispersion while canceling out second-order aberrations. The energy filter is mirror-symmetric with respect to the center plane C. A beam enters a first nonuniform magnetic field produced by a first magnet, then enters a second nonuniform magnetic field region produced by a second magnet. The trajectory of the beam is curved by the field produced by the second magnet. Finally, the beam enters a third magnetic field region produced by the first magnet. The beam is deflected in this region and reaches an exit slit.

Energy filter

There is disclosed an energy filter capable of reducing the Boersch effect. Also, an electron microscope using this energy filter is disclosed. This energy filter is composed of a first-stage energy filter and a second-stage energy filter arranged along the optical axis of an electron beam. The length L of the first-stage filter is selected to be greater than the length L of the second-stage filter. An energy-selecting slit is positioned in the electron beam path within the free space between the first- and second-stage filters. Each of these two stages of filters is a Wien filter having mutually perpendicular electric and magnetic fields.

Energy filter and electron microscope using same

There is disclosed an imaging energy filter equipped with a distortion corrector. The energy filter is incorporated in an electron microscope and includes a spectrometer having magnets for producing magnetic fields. In this spectrometer, coils for exciting the magnets and potentiometers having variable resistors are connected in parallel. The variable resistors of the potentiometers are shifted to control the ratio of currents flowing into coils of shunting circuits.

Imaging energy filter equipped with distortion corrector

There is disclosed an electron-beam biprism for use in an electron-beam holographic interference microscope. The biprism comprises a rotary plate having a hole permitting passage of an electron beam, a biprism wire mounted to the rotary plate and electrically insulated from the rotary plate, a holder, a rotating mechanism, a heating mechanism for heating the biprism wire, a voltage source for applying a voltage to the biprism wire, and a pair of grounding electrodes extending parallel to the biprism wire which bridges across the hole. The rotary plate is rotatably held by the holder so as to be rotatable about the hole. The grounding electrodes are mounted to the rotary plate. The biprism wire is sandwiched between the grounding electrodes.

Electron-beam biprism

An electron microscope equipped with an x-ray detector whose position is made different, depending on whether the detector is in use or not. The microscope prevents the irradiated position and the image from escaping even when the detector is moved into or out of a valve. A switch is operated to move the detector. The microscope has a deflection current-correcting circuit which supplies correcting currents to the deflection coils in step with the operation of the switch.

Electron microscope equipped with x-ray analyzer

A specimen-driving apparatus used with an electron microscope. The apparatus can translate or tilt the specimen holder while preventing it from being damaged if a human operator performs any erroneous operation. The device has X, Y, Z translation directive devices, and a tilt directive device for permitting the operator to enter instructions for translating and tilting the specimen holder. A contact detector senses that the holder is in contact with the upper magnetic pole piece. A tilt condition decision portion determines whether the holder has tilted into the positive or negative domain. A Z domain decision portion determines whether the Z coordinate of the holder lies in the positive or negative domain. When the contact of the holder with the pole piece is detected, reverse movement of the holder along the Z-axis is inhibited. Also, reverse tilting movement of the holder is inhibited. When the holder comes out of contact with the pole piece, these reverse movements are permitted.

Specimen-driving apparatus for electron microscope which tilts and

Method and apparatus for correcting the axial coma in the image created by an electron microscope without requiring skillfulness or any other peripheral device. The microscope is equipped with a beam wobbler and brings the voltage center or current center into the middle of the final image by controlling the deflection coils. The amount of the deviation of the voltage center or current center from the coma-free axis is previously found and stored in an area of a memory. This beam is tilted by the amount of the deviation read from the memory. For this purpose, a deflecting signal corresponding to the amount of the deviation is produced to the deflection coils. Therefore, once the deviation is found, the axial coma can be corrected simply and routinely by correcting the beam tilt by the amount of deviation after the voltage center or current center is brought into the middle of the final image.

Method and apparatus for correcting axial coma in electron microscopy

In an electron microscope, having intermediate lenses between the object and the projection lenses, the first and second intermediate lenses are used for rotating the final electron microscope image without changes in magnification. The desired angle signal indicating to azimuth angle .theta. is designated by an operator. The absolute magnetomotive force .vertline.J1.vertline. and .vertline.J2.vertline. of the first and second intermediate lenses are controlled by a lens control means in the relation that (.vertline.J1.vertline.-.vertline.J2.vertline.) is proportional to the azimuth angle .theta. and (.vertline.J1.vertline.+.vertline.J2.vertline.) is nearly proportional to the square of the azimuth angle .theta..

Growing community of inventors

Tokyo, Japan

Toshikazu Honda