Fuji Photo Optical Co., Ltd.

Toshikazu Akaogi

Motonori Kanaya

Kazuyoshi Yamasaki

Masami Yoneda

Hiroshi Shibamoto

A support apparatus for an optical wave interferometer reference plate comprises a support member for supporting an outer peripheral face of the reference plate. The support member is bonded to the outer peripheral face of the reference plate at a plurality of positions spaced from each other along the circumferential direction of the outer peripheral face and adapted to deform elastically in a circumferential/diametric direction of the reference plate but less in the optical axis direction of the reference plate than in the circumferential/diametric direction.

Support apparatus for optical wave interferometer reference plate

A subject positioning device for an interferometer includes a positioning mechanism for positioning a test surface within an axial extent of interference positions in the object beam path, which is less than double of a thickness of the subject, and at least one positioning lens placed between a beam splitter and the axial extent of interference positions in the object beam path with a focal point located within the axial extent of interference positions.

Subject positioning device for optical interferometer

An alignment verification system for adjusting the posture of a test piece on a support table into alignment with a reference plate on an interferometer containing a light source to irradiate the test piece and reference plate, the verification system including: a bi-axial adjustment means for tilting the support table in the directions of perpendicularly intersecting X- and Y-axis; spot image forming means arranged to converge light reflections from a master surface of the reference plate and an inspecting surface of the test piece into spot images of a predetermined diameter at a predetermined spot image-forming plane; a line sensor located at the spot image-forming plane across the spot image of the reference plate and having a linear light receiving face switchable through 90.degree. between an X-axis position and a Y-axis position corresponding to the directions of the X- and Y-axes of the bi-axial adjustment means, for detecting the spot image of the test piece in relation with tilting adjustments of the support table by the bi-axial adjustment mechanism in each of the X- and Y-axis positions; and a sensor drive mechanism adapted to switch the light receiving face of the line sensor from the X-axis position to the Y-axis position or vice versa upon detecting the spot image of the test piece in one of the X- and Y-axis positions.

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Saitama-ken, Japan

Toshikazu Akaogi