Other

Kabushiki Kaisha Watanabe Shoko

Kabushiki Kaisha Motoyamaseisakusho

Toshikatu Meguro

Masaru Umeda

Masayuki Toda

Masaki Kusuhara

Osamu Uchisawa

Mitsuru Fukagawa

Yoichi Kanno

Mikio Doi

Kohei Yamamoto

Disclosed is a vaporizer constituted of a dispersing sectionand a vaporizing section. The dispersing sectioncomprises a gas introduction portfor introducing a carrier gasunder pressure into a gas passage, means for feeding raw material solutionsandto the gas passage, and a gas outletfor delivering the carrier gas containing the raw material solutions to the vaporizing section. The vaporizing sectioncomprises a vaporizing tubehaving one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outletof the dispersing section, and heating means for heating the vaporizing tube. The vaporizing sectionserves to heat and vaporize the raw material solution containing carrier gasdelivered from the dispersing section. The dispersing sectionincludes a dispersing section bodyhaving a cylindrical hollow portion, and a rodhaving an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rodhas a spiral grooveformed in the external periphery closer to the vaporizing section, the rod ibeing inserted into the cylindrical hollow portion.

Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD

Disclosed is a vaporizer constituted of a dispersing sectionand a vaporizing sectionThe dispersing sectioncomprises a gas introduction portfor introducing a carrier gasunder pressure into a gas passage, means for feeding raw material solutionsandto the gas passage, and a gas outletfor delivering the carrier gas containing the raw material solutions to the vaporizing sectionThe vaporizing sectioncomprises a vaporizing tubehaving one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outletof the dispersing sectionand heating means for heating the vaporizing tubeThe vaporizing sectionserves to heat and vaporize the raw material solution containing carrier gasdelivered from the dispersing sectionThe dispersing sectionincludes a dispersing section bodyhaving a cylindrical hollow portion, and a rodhaving an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rodhas a spiral grooveformed in the external periphery closer to the vaporizing sectionthe rodbeing inserted into the cylindrical hollow portion.

Disclosed is a vaporizer constituted of a dispersing section and a vaporizing section The dispersing section comprises a gas introduction port for introducing a carrier gas under pressure into a gas passage, means for feeding raw material solutions and to the gas passage, and a gas outlet for delivering the carrier gas containing the raw material solutions to the vaporizing section The vaporizing section comprises a vaporizing tube having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet of the dispersing section and heating means for heating the vaporizing tube The vaporizing section serves to heat and vaporize the raw material solution containing carrier gas delivered from the dispersing section The dispersing section includes a dispersing section body having a cylindrical hollow portion, and a rod having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod has a spiral groove formed in the external periphery closer to the vaporizing section the rod being inserted into the cylindrical hollow portion.

Growing community of inventors

Miyagi-ken, Japan

Toshikatu Meguro