Jeol Ltd.

Other

Toshikatsu Kaneyama

Toshikazu Honda

Masami Terauchi

Kenji Tsuda

Mikio Naruse

Hiromi Nunome

Michiyoshi Tanaka

Masaki Takeguchi

Ikuya Nishimura

Yu Ishibashi

Noriaki Mizuno

A charged particle beam apparatus that includes a magnetic lens having an electromagnetic coil composed of a pair of coils includes: a setting unit that sets a maximum current value that defines a maximum magnetomotive force of the magnetic lens based on an operation of a user; and a current control unit that controls a current to be supplied to each of the pair of coils within a current range corresponding to a set maximum current value so that thermal power consumed by the electromagnetic coil is maintained constant at thermal power corresponding to the set maximum current value.

Charged particle beam apparatus and control method of charged particle beam apparatus

A scanning electron microscope includes an FIB column, an SEM column, and a control unit which controls the FIB column and the SEM column. The control unit performs: processing to control the FIB column so that a cross-section of a specimen S is repeatedly exposed at predetermined intervals; processing to perform a first measurement to acquire a first image by irradiating a cross-section of the specimen S with an electron beam each time when a cross-section of the specimen S is exposed; and processing to perform a second measurement to acquire a second image by irradiating a cross-section of the specimen S with an electron beam each time when a cross-section of the specimen S is exposed n times (n is an integer of 2 or more).

Scanning electron microscope and measurement method for obtaining images of a specimen using an ion beam and an electron beam

There is disclosed an electron microscope that achieves low-magnification imaging while the objective lens is kept at high excitation in the same way as during high-magnification imaging. An objective minilens located immediately behind the objective lens demagnifies a specimen image magnified by the objective lens. Consequently, a sharply focused electron beam enters the first intermediate lens. This greatly reduces the effects of off-axis aberrations in the intermediate lenses. The first, second, and third intermediate lenses create a crossover image and a microscope image in the entrance window plane and entrance image plane, respectively, of an energy filter. The energy filter focuses the microscope image and crossover image onto the exit image plane and exit window plane, respectively. The output image from the filter is projected onto the final image plane by first and second projector lenses.

Electron microscope

A method of analysis using an energy loss spectrometer and a transmission electron microscope equipped with the energy loss spectrometer. The spectrometer has a CCD camera for recording plural spectra as one photoelectric device image and a controller for batch reading in images from the camera, converting the positions of the pixels forming the images, and splitting each image into plural spectra. This permits improvement of the processing speed of the spectrometer.

Method of analysis using energy loss spectrometer and transmission electron microscope equipped therewith

An electron beam apparatus having an electron analyzer is achieved which can control the illumination lens system by feedback without adversely affecting the imaging action even if a specimen is positioned within the magnetic field of the objective lens. The apparatus has an energy shift control module for controlling energy shift. On receiving instructions about setting of energy shift from the CPU, the control module issues an instruction for shifting the accelerating voltage to a specified value to an accelerating-voltage control module. The control module also sends information about the energy shift to an energy shift feedback control module, which calculates the feedback value and supplies information about corrections of lenses and deflection coils to a TEM optics control module. The feedback value is multiplied by a corrective coefficient that can be calibrated.

Electron beam apparatus having electron analyzer and method of controlling lenses

A transmission electron microscope (TEM) equipped with an energy filter, the microscope being characterized in that rotation of the created image or diffraction pattern is prevented. The microscope has 6 lens systems, i.e., an objective lens system, four intermediate lens systems, and a projector lens system. If the mode of operation is varied, the total sum of the products of the numbers of turns of wire on the coils of the lenses of the various lens systems including the objective lens system, the four intermediate lens systems, and the projector lens system, and their respective excitation currents is kept constant.

Transmission electron microscope equipped with energy filter

A transmission electron microscope (TEM) equipped with an energy filter which functions, the microscope being characterized in that rotation of the created image or diffraction pattern is prevented. The microscope has 6 lens systems, i.e., objective lens system, four intermediate lens systems, and projector lens system. If the mode of operation is varied, the total sum of the products of the numbers of turns of wire on the coils of the lenses of the various lens systems including the objective lens system, the four intermediate lens systems, and the projector lens system, and their respective excitation currents is kept constant.

A holography electron microscope permitting electron holography without limitations on the magnification. An electron biprism is mounted between a system of intermediate lenses and a system of projector lenses. The objective lens and the system of intermediate lenses form a crossover at a given position between intermediate lenses and the electron biprism and, at the same time, focus a magnified image at a certain position between the electron biprism and projector lenses. Since the system of intermediate lenses is made up of three or more stages of lenses, it forms a crossover at a given position and focuses a magnified image at a certain position.

Holography transmission electron microscope

There is disclosed an energy filter for use in an electron microscope, the energy filter having an electron passage that can be evacuated more reliably than heretofore. The filter can be designed compactly without increasing the polepiece gaps or the spaces to accommodate coils. The energy filter has an electron-deflecting magnet assembly. This assembly comprises a pair of opposite polepiece bases, a pair of spacers interposed between the polepiece bases, and a yoke mounted to side surfaces of the polepiece bases. Magnetic polepieces and coil grooves of a given width are formed in the opposite surfaces of the polepiece bases. Bulges forming shunts are formed outside the coil grooves in the polepiece bases. O-ring grooves are formed in the spacers on the sides of the polepiece bases around the coil grooves. Electron passage grooves are formed in the opposite surfaces of the spacers to form the electron passage.

Electron beam energy filter

There is disclosed an imaging energy filter equipped with a distortion corrector. The energy filter is incorporated in an electron microscope and includes a spectrometer having magnets for producing magnetic fields. In this spectrometer, coils for exciting the magnets and potentiometers having variable resistors are connected in parallel. The variable resistors of the potentiometers are shifted to control the ratio of currents flowing into coils of shunting circuits.

Imaging energy filter equipped with distortion corrector

There is disclosed an .OMEGA.-filter for use with an electron microscope. This filter has only one parameter that controls the exciting currents supplied to four magnets M.sub.1 -M.sub.4. Only those electrons of incident electrons that have a given energy pass through the successive magnets and emerge from the filter. The coils of the magnets M.sub.1 and M.sub.4 are identical in number of turns and connected in series. Similarly, the coils of the magnets M.sub.2 and M.sub.3 are identical in number of turns and connected in series. When a human operator specifies an exciting current i.sub.1 through an entry device, a controller causes a power supply P.sub.1 to produce this exciting current i.sub.1, thus exciting the magnets M.sub.1 and M.sub.4. The controller calculates an exciting current i.sub.2 from the exciting current i.sub.1, and causes a power supply P.sub.2 to produce this exciting current i.sub.2, thus exciting the magnets M.sub.2 and M.sub.3.

Energy filter

A specimen-driving apparatus used with an electron microscope. The apparatus can translate or tilt the specimen holder while preventing it from being damaged if a human operator performs any erroneous operation. The device has X, Y, Z translation directive devices, and a tilt directive device for permitting the operator to enter instructions for translating and tilting the specimen holder. A contact detector senses that the holder is in contact with the upper magnetic pole piece. A tilt condition decision portion determines whether the holder has tilted into the positive or negative domain. A Z domain decision portion determines whether the Z coordinate of the holder lies in the positive or negative domain. When the contact of the holder with the pole piece is detected, reverse movement of the holder along the Z-axis is inhibited. Also, reverse tilting movement of the holder is inhibited. When the holder comes out of contact with the pole piece, these reverse movements are permitted.

Specimen-driving apparatus for electron microscope which tilts and

Method and apparatus for correcting the axial coma in the image created by an electron microscope without requiring skillfulness or any other peripheral device. The microscope is equipped with a beam wobbler and brings the voltage center or current center into the middle of the final image by controlling the deflection coils. The amount of the deviation of the voltage center or current center from the coma-free axis is previously found and stored in an area of a memory. This beam is tilted by the amount of the deviation read from the memory. For this purpose, a deflecting signal corresponding to the amount of the deviation is produced to the deflection coils. Therefore, once the deviation is found, the axial coma can be corrected simply and routinely by correcting the beam tilt by the amount of deviation after the voltage center or current center is brought into the middle of the final image.

Growing community of inventors

Tokyo, Japan

Toshikatsu Kaneyama