Ngk Insulators, Inc.

Toshihisa Mizutani

Shinsuke Yano

Masato Komazawa

A method for polarization treatment of a piezoelectric/electrostrictive film type chip, comprising: providing a piezoelectric/electrostrictive film type chip comprising a plurality of piezoelectric/electro-strictive film type elements each having a piezoelec-tric/electrostrictive section constituted by a thin diaphragm, a lower electrode formed on the diaphragm, a piezoelectric/electrostrictive layer formed on the lower electrode, and an upper electrode formed on the piezoelectric/electrostrictive layer, dividing the plurality of piezoelectric/electrostrictive film type elements into two or more element groups, and subjecting each element group to a polarization treatment. The chip after the polarization treatment is low in dielectric breakdown and can be used as a reliable piezoelectric/electrostrictive film type chip.

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Nagoya, Japan

Toshihisa Mizutani