Japan Atomic Energy Agency

Nikkin Flux Inc.

Toshihisa Hatano

Tetsuya Abe

Yoshinori Ono

Takashi Futatsuki

Sadamitsu Tanzawa

Yasuhide Tajima

Hajime Hiratsuka

Soichiro Omachi

Koichi Hasegawa

A gas amount measuring device including a vacuum container, a first pipe, an air release valve being attached to the first pipe, a second pipe, a calibration gas generator being attached to the first pipe, a third pipe, a vacuum gauge, a first valve, a leak valve, a second valve, a turbomolecular pump, a third valve, and a roughing pump being attached to the third pipe in order from a vacuum container side, a first bypass pipe connecting the third pipe between the vacuum container and the first valve to the third pipe between the leak valve and the second valve, a fourth valve being attached to the first bypass pipe, and a second bypass pipe connecting the third pipe between the leak valve and the second valve to the third pipe between the third valve and the roughing pump, a fifth valve being attached to the second bypass pipe.

Gas amount measurement device

There is provided a gas separation apparatus for separating a specified gas from a gas to be treated containing a plurality of gases. The gas separation apparatus includes a plurality of serially-connected separation units that separate the specified gas from other gases by using a column, and a suction unit that controls an inside of the column to a reduced pressure. At least two of the plurality of separation units differ from each other in at least one separation condition.

Apparatus and method for separating gas

Growing community of inventors

Naka-gun, Japan

Toshihisa Hatano