Hitachi High-tech Science Corporation

Toshihiro Ueno

Masafumi Watanabe

Susumu Ito

Yoshiteru Shikakura

Shoichi Hasegawa

Shinya Kudo

Masayuki Iwasa

Provided is a scanning probe microscope with which measurement data and a distribution image of differential data of the measurement data can be displayed selectively or together, an edge enhancement image can be obtained, and user convenience is improved. A scanning probe microscope () includes: a distribution image calculator () configured to calculate a one-dimensional or two-dimensional first distribution image () of measurement data, and a one-dimensional or two-dimensional second distribution image () of differential data of adjacent data elements of the measurement data; and a display controller () configured to instruct the distribution image calculator to calculate at least one of the first distribution image or the second distribution image, and to display the calculated distribution image on a predetermined display.

Scanning probe microscope

A scanning probe microscope includes: a cantilever; a cantilever supporting portion; a movement mechanism that moves a position of the cantilever; a light source that emits detection light; a detector that receives the detection light reflected on a reflecting surface of the cantilever; an objective lens; and a controller that controls the movement mechanism to perform a process including: detecting a spot position of a spot light of the detection light; detecting a position of the cantilever from an image captured by the imaging device; and controlling the movement mechanism based on the spot position, the position of the cantilever, an incident angle of the detection light, and the attachment angle such that the detection light is reflected on the reflecting surface when the cantilever is attached to the cantilever supporting portion.

Scanning probe microscope and optical axis adjustment method for scanning probe microscope

Growing community of inventors

Toyko, Japan

Toshihiro Ueno