Seiko Epson Corporation

Fujitsu Ten Limited

Toshihiro Shimizu

Eiju Hirai

Masao Nakayama

Hiroshi Ito

Jiro Kato

Motoki Takabe

Hiromu Miyazawa

Harunobu Koike

Koji Sumi

Shiro Yazaki

Takahiro Kamijo

Yasushi Yamazaki

Tatsuro Torimoto

Tatsuo Sawasaki

Chihiro Nishi

Chikara Kojima

Naoto Yokoyama

Kazuya Sako

Kazuhiro Sakiyama

Yasuaki Hamada

Yasuhiro Itayama

Ichiro Asaoka

Tomohiro Sakai

Takanori Aimono

Eiji Osawa

Takeshi Saito

Osamu Tonomura

Yoshihiro Hokari

Yoichi Naganuma

Koichi Morozumi

Toshiki Hara

Akira Kuriki

Katsumi Tanaka

Masayuki Omoto

Shunsuke Yoshida

Noritaka Mochizuki

Takashi Kasahara

A piezoelectric element includes: a first electrode; an oxide layer formed on the first electrode; a piezoelectric layer formed on the oxide layer and containing potassium, sodium, and niobium; and a second electrode formed on the piezoelectric layer. When a potential difference of 10 V is applied between the first electrode and the second electrode, a current density of a leak current differs by 10,000 times or more between a case in which the first electrode is set at a high potential and a case in which the second electrode is set at a high potential.

Piezoelectric element and liquid ejection head

A method for producing a piezoelectric actuator including forming a vibration plate, forming a first electrode on the vibration plate, forming a piezoelectric layer on the first electrode, and forming a second electrode on the piezoelectric layer, wherein the forming the vibration plate has a single layer forming step including forming a metal layer containing zirconium by a gas phase method, and forming a metal oxide layer by firing the metal layer, the single layer forming step is repeated, thereby forming the vibration plate in which the metal oxide layers are stacked, and the metal oxide layer has a thickness less than 200 nm.

Method for producing piezoelectric actuator

A piezoelectric substrate includes: a substrate; a first electrode formed on the substrate; and a piezoelectric layer formed on the first electrode and containing potassium, sodium, and niobium. A full width at half maximum of an X-ray intensity peak on a plane (100) of the piezoelectric layer in a Psi axis-direction scan result of an X-ray diffraction measurement in which a surface of the piezoelectric layer is irradiated with X-rays at an angle of 54.74° from a direction perpendicular to the surface is more than 0° and 1.2° or less.

Piezoelectric substrate, piezoelectric element and liquid ejection head

A liquid ejecting head includes a piezoelectric element and a vibrating plate configured to vibrate in response to actuation of the piezoelectric element, the vibrating plate including a first layer that contains SiOand a second layer that contains ZrOand that is stacked on the first layer. The second layer contains a first impurity element different from Zr, and the concentration of the first impurity element at an interface in contact with the first layer in the second layer is higher than the concentration of the first impurity element in an internal region that is included in the second layer and that is contiguous from the interface to the surface of the second layer.

Liquid ejecting head, liquid ejecting apparatus, and actuator

The diaphragm includes a first layer containing silicon as a constituent element, a third layer disposed between the first layer and the piezoelectric actuator and containing zirconium as a constituent element, and a second layer disposed between the first layer and the third layer and containing at least one selected from the group consisting of a metal other than iron, silicon, and zirconium, a metalloid, and a semiconductor, as a constituent element, in the second layer and the third layer, a position with a highest concentration of impurities other than the constituent elements of the second layer and the third layer is in the second layer, a position with a highest concentration of zirconium is in the third layer, and a position with a highest concentration of silicon is in the first layer.

Piezoelectric device, liquid ejecting head, liquid ejecting apparatus, and method of manufacturing piezoelectric device

A substrate, a diaphragm, and a piezoelectric actuator are laminated in this order in a first direction, the diaphragm includes a first layer containing silicon as a constituent element, a second layer disposed between the first layer and the piezoelectric actuator, and containing any one or both of at least one metal element selected from the group made of chromium, titanium, aluminum, tantalum, hafnium, and iridium, and silicon nitride, as a constituent element, and a third layer disposed between the second layer and the piezoelectric actuator and containing zirconium as a constituent element, and a fourth layer containing any one or both of at least one metal element selected from the group made of chromium, titanium, aluminum, tantalum, hafnium, and iridium, and silicon nitride, as a constituent element is provided on the third layer on a piezoelectric actuator side.

Piezoelectric device and liquid ejecting head

A liquid ejection head includes: a piezoelectric body; an vibration plate to be vibrated by a drive of the piezoelectric body; and a pressure chamber substrate including a pressure chamber which applies a pressure to a liquid by an vibration of the vibration plate; the pressure chamber substrate, the vibration plate, and the piezoelectric body are laminated in this order; and the vibration plate includes: a first layer containing silicon as a constituent element, a second layer which is disposed between the first layer and the piezoelectric body and which contains as a constituent element, a metal element selected from chromium, titanium, and aluminum, and a third layer which is disposed between the second layer and the piezoelectric body and which contains zirconium as a constituent element.

Liquid ejection head, liquid ejection apparatus, piezoelectric device, and method for manufacturing piezoelectric device

A liquid ejecting apparatus includes: a liquid ejecting head that includes a flow path formation substrate in which a pressure chamber communicating with a nozzle is formed, a vibration plate, and a piezoelectric actuator having a first electrode, a piezoelectric layer, and a second electrode; and a drive unit that supplies a drive signal for driving the piezoelectric actuator, in which the piezoelectric actuator includes an active portion, the active portion is extended from an edge portion, which is a region other than a central portion of a region facing the pressure chamber, to the outside of the pressure chamber, and the drive signal includes a contraction element that contracts the pressure chamber from a reference volume of the pressure chamber when no electric field is applied to the piezoelectric layer, and an expansion element that expands the pressure chamber contracted by the contraction element.

Liquid ejecting apparatus and method of driving liquid ejecting head

The interface region may include a region in which first intensity is higher than second intensity and in which the first intensity is higher than third intensity, where a degree of orientation of the (&#x2212;211) crystal face of the second layer is denoted as the first intensity, the degree of orientation of the (&#x2212;111) crystal face of the second layer is denoted as the second intensity, and the degree of orientation of the (002) crystal face of the second layer is denoted as the third intensity. The surface-layer region may include a region in which the first intensity is higher than the third intensity and in which the second intensity is higher than the third intensity.

An electric current based on electric charge produced on the piezoelectric body changes by going through a first path, a second path, a third path, and a fourth path in this order. On the first path, the electric current becomes larger as the voltage becomes higher. On the second path, the electric current becomes smaller as the voltage becomes higher. On the third path, the electric current becomes larger as the voltage becomes higher. On the fourth path, the electric current becomes smaller as the voltage becomes higher.

Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus

A piezoelectric device includes a piezoelectric body, a vibration plate that vibrates when the piezoelectric body is driven, a first electrode positioned between the piezoelectric body and the vibration plate, and a second electrode positioned to be separated from the first electrode by the piezoelectric body. The piezoelectric body has an active portion that is a part sandwiched between the first electrode and the second electrode in a first direction along a thickness direction of the piezoelectric body, and a change width of a dC/dV value, which represents a change in capacitance with respect to a change in a voltage applied along a second direction orthogonal to the first direction, from one end of the active portion on a side of the first electrode to the other end of the active portion on a side of the second electrode in the first direction is 10% or less.

Piezoelectric device, liquid discharge head, liquid discharge device, and method for manufacturing piezoelectric device

A liquid ejecting apparatus is provided comprising: a liquid ejecting head; and a controller. The liquid ejecting head including: a nozzle from which a liquid is ejected; a first communication passage that is in communication with the first nozzle; a first pressure compartment; a first drive element that changes a pressure of the first pressure compartment; a first passage that connects the first pressure compartment and the first communication passage; a second pressure compartment; a second drive element that changes a pressure of the second pressure compartment; a second passage that connects the second pressure compartment and the first communication passage. The controller performs a first mode and a second mode, the first mode being a mode in which liquid flows from the first pressure compartment through the first communication passage to the nozzle, and liquid flows the second pressure compartment through the second communication passage to the nozzle, and, the second mode being a mode in which liquid flows from the first pressure compartment through the first communication passage to the nozzle, and liquid flows from the nozzle through the second communication passage to the second pressure compartment.

Liquid ejecting head and liquid ejecting apparatus

A piezoelectric device including a flow path forming substrate in which pressure chambers are formed, a diaphragm, and piezoelectric actuators. Active portions, each having a piezoelectric layer interposed between a first electrode and a second electrode, are each, in plan view, provided from an edge portion opposing the pressure chamber to a portion outside the pressure chamber, and a ratio of a film thickness of the piezoelectric layer to a film thickness of the diaphragm is 4.7 or less.

Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus

A liquid ejecting head including a flow path forming substrate in which a pressure chamber is formed, a diaphragm, and a piezoelectric actuator. The piezoelectric actuator includes an active portion in which a piezoelectric layer is interposed between a first electrode and a second electrode. The active portion, in plan view, overlaps at least a portion of the pressure chamber and is provided so as to extend to an outside of the pressure chamber. The pressure chamber is formed so that, the closer to the piezoelectric actuator in a layered direction of the flow path forming substrate and the diaphragm, a width of the pressure chamber in a direction intersecting the layered direction becomes smaller.

Growing community of inventors

Fujimi-machi, Japan

Toshihiro Shimizu