Sony Semiconductor Solutions Corporation

Toshihiro Kurobe

Atsushi Yamamoto

Minoru Ishida

Nobutoshi Fujii

Hiroshi Tazawa

Suguru Saito

Hiroyasu Matsugai

Hiroyuki Itou

Toshiaki Shiraiwa

Keiji Ohshima

Koichi Takeuchi

Kunihiko Hikichi

Sotetsu Saito

An imaging device is provided which allows an increase in the degree of freedom of its layout. The imaging device includes a first semiconductor substrate including a sensor pixel for performing photoelectric conversion, and a second semiconductor substrate including a readout circuit for outputting a pixel signal according to an electric charge output from the sensor pixel. The second semiconductor substrate is laminated on the one surface side of the first semiconductor substrate so as to configure a laminated body. The second semiconductor substrate includes a first surface facing the first semiconductor substrate, and a second surface located opposite to the first surface. The first transistor included in the readout circuit is disposed in the first surface, and the second transistor included in the readout circuit is disposed in the second surface.

Imaging device with improved layout of reading circuit transistors

To suppress occurrence of contamination or damage to a lens. In the present technology, for example, a manufacturing apparatus allows a spacer which is thicker than a height of a lens resin portion protruded from a substrate to be adhered to the substrate. In addition, for example, in the present technology, the manufacturing apparatus molds the lens resin portion inside a through-hole formed in the substrate by using a mold frame configured with two layers of molds and, after molding the lens resin portion, in the state that one mold is adhered to the substrate, the manufacturing apparatus demolds the substrate from the other mold. The present technology can be applied to, for example, a lens-attached substrate, a stacked lens structure, a camera module, a manufacturing apparatus, a manufacturing method, an electronic apparatus, a computer, a program, a storage medium, a system, or the like.

Lens-attached substrate, stacked lens structure, camera module, and manufacturing apparatus and method

A positional shift of a lens of a stacked lens structure is reduced. A plurality of through-holes is formed at a position shifted from a first target position on a substrate according to a first shift. A lens is formed on an inner side of each of the through-holes using a first mold in which a plurality of first transfer surfaces is disposed at a position shifted from a predetermined second target position according to a second shift and a second mold in which a plurality of second transfer surfaces is disposed at a position shifted from a predetermined third target position according to a third shift. The plurality of substrates having the lenses formed therein is formed according to direct bonding, and the plurality of stacked substrates is divided. The present technique can be applied to a stacked lens structure or the like, for example.

Stacked lens structure, method of manufacturing the same, electronic apparatus, mold, method of manufacturing the same, and substrate

Substrates with lenses having lenses disposed therein are aligned with high accuracy. A stacked lens structure has a configuration in which substrates with lenses having a lens disposed on an inner side of a through-hole formed in the substrate are direct-bonded and stacked based on an alignment mark. The alignment mark is formed simultaneously with the through-hole. The present technique can be applied to a camera module or the like in which a stacked lens structure in which at least three substrates with lenses including first to third substrates with lenses which are substrates with lenses in which a through-hole is formed in the substrate and a lens is formed on an inner side of the through-hole is integrated with a light receiving element, for example.

Stacked lens structure, method of manufacturing the same, and electronic apparatus

Growing community of inventors

Kanagawa, Japan

Toshihiro Kurobe