Horiba Stec, Co., Ltd.

Horiba, Ltd.

Toshihiro Ikeyama

Kohei Sasai

Hiroshi Uchihara

Takahito Inoue

Kazushi Sasakura

Toshiaki Sakai

A quadrupole mass spectrometer includes an ion source that ionizes a sample, a filter unit that includes a quadrupole and separates ions generated from the ion source according to mass, a detector that detects ions passing through the filter unit, a filter voltage controller that controls a filter voltage applied to the quadrupole to switch between a blocking mode in which ions entering the filter unit are not allowed to impinge on the detector and a passing mode in which ions entering the filter unit are allowed to impinge on the detector, the filter voltage including a radio-frequency voltage and a direct-current voltage, a baseline computing unit that computes a baseline based on outputs of the detector in the blocking mode, and an analyzing unit that outputs an analysis result of the sample based on outputs of the detector in the passing mode and the computed baseline.

Quadrupole mass spectrometer, quadrupole mass spectrometry method, and program storage medium storing program for quadrupole mass spectrometer

An objective of this invention is to conduct an accurate quantitative analysis on the Ar element contained in a sample gas by an element analysis device comprising a heating furnace and a mass spectrometer for conducting a quantitative analysis on an element in a vacuum atmosphere. The element analysis device comprises: a heating furnace that heats a graphite crucible containing a sample while introducing a carrier gas into the heating furnace, thereby vaporizing the sample to generate a sample gas; a quadrupole mass spectrometer that conducts the quantitative analysis on the Ar element contained in the sample gas in a mixed gas comprising the carrier gas and the sample gas discharged from the heating furnace, a first pressure regulator that controls the pressure of the carrier gas to be introduced into the heating furnace, and a second pressure regulator that controls the pressure of the mixed gas discharged from the heating furnace.

Element analysis device and element analysis method

In order to provide a thermionic emission filament capable of ensuring a long life and improving an analysis accuracy of a mass spectrometer using the thermionic emission filament, in the thermionic emission filament including a core member through which electric current flows and an electron emitting layer which is formed so as to cover a surface of the core member, the electron emitting layer is configured to have denseness for substantial gas-tight integrity.

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Kyoto, Japan

Toshihiro Ikeyama