Canon Kabushiki Kaisha

Tokyo Institute of Technology

National Institute of Advanced Industrial Science and Technology

Other

University of Yamanashi

Sophia University

Kyoto University

Tokyo University of Science Educational Foundation Administrative Organization

Toshihiro Ifuku

Tatsuya Suzuki

Takanori Matsuda

Kenichi Takeda

Tetsuro Fukui

Tatsuo Furuta

Katsumi Aoki

Makoto Kubota

Hiroshi Funakubo

Jumpei Hayashi

Koji Suzuki

Yasushi Shimizu

Satoshi Wada

Takayuki Watanabe

Nobuhiko Sato

Hiroshi Saito

Hiroshi Uchida

Hisato Yabuta

Shinya Koyama

Takehito Okabe

Akira Shimada

Hideaki Takahashi

Hidenori Tanaka

Masami Tsukamoto

Yutaka Maruyama

Takashi Iijima

Shintaro Yokoyama

Nobuhiro Kumada

Mikio Shimada

Kaoru Miura

Toshiaki Aiba

Masaki Azuma

Soichiro Okamura

Hiroshi Aoto

Kiyotaka Wasa

Bong-Yeon Lee

Keisuke Yamato

Hiroshi Nakaki

Satoshi Fujita

Satoshi Okamoto

Makoto Kurotobi

Shoji Okamoto

Olga Alexandrovna Smirnova

Yong Kwan Kim

Rikyu Ikariyama

Masaru Shimizu

Risako Ueno

Akira Uebayashi

Hisanobu Azuma

Zuyi Zhang

Toshifumi Urakami

Kaishi Ohashi

Masami Yonekawa

Akio Ikesue

Keisuke Yazawa

Ken Nishida

Kazuki Matsushima

Tomoaki Masubuchi

Takashi Katoda

Osami Sakata

The present invention provides an evaluation method for evaluating a state in an apparatus concerning particles existing inside a substrate processing apparatus for processing a substrate, including arranging a plate in a charged state inside the apparatus and obtaining the number of particles adhered to the plate by performing a dummy operation different from an operation of processing the substrate, and evaluating the state in the apparatus based on a coefficient representing a ratio of the number of particles adhered to the plate by performing the dummy operation for the plate in an uncharged state to the number of particles adhered to the plate in the charged state, and the number of particles obtained in the arranging the plate.

Evaluation method, substrate processing apparatus, manufacturing method of substrate processing apparatus and article manufacturing method

A piezoelectric material including a perovskite-type metal oxide represented by the following general formula (1); Bi; and Mn, wherein the content of Bi is 0.1-0.5 mol % with respect to 1 mol of the metal oxide, the content of Mn is 0.3-1.5 mol % with respect to 1 mol of the metal oxide, and the piezoelectric material satisfies (L&#x2212;L)/L&#x2265;0.05 and (L&#x2212;L)/L&#x2265;0.05 when the lengths of twelve Bi&#x2014;O bonds with Bi that is located at a 12-fold site with respect to O in a perovskite-type unit cell as a starting point are taken to be Lto Lin length order:(BaM1)(TiM2)O&#x2003;&#x2003;(1)wherein 0&#x2264;x&#x2264;0.2, 0&#x2264;y&#x2264;0.1, and M1 and M2 are mutually different metal elements which have a total valence of +6 and are selected from other elements than Ba, Ti, Bi and Mn.

Piezoeletric material, piezoelectric element, liquid discharge head, liquid discharge apparatus, vibration wave motor, optical instrument, vibration apparatus, dust removing apparatus, imaging apparatus and electronic device

A barium titanate piezoelectric ceramic having good piezoelectric properties and mechanical strength and a piezoelectric element that includes the ceramic are provided. A method for making a piezoelectric ceramic includes forming a compact composed of an oxide powder containing barium titanate particles, sintering the compact, and decreasing the temperature of the compact after the sintering. The sintering includes (A) increasing the temperature of the compact to a first temperature within a temperature range of a shrinking process of the compact; (B) increasing the temperature of the compact to a second temperature within a temperature range of a liquid phase sintering process of the compact after (A); (C) decreasing the temperature of the compact to a third temperature within the temperature range of the shrinking process of the compact after (B); and (D) retaining the third temperature after (C).

Piezoelectric ceramic, method for making the same, piezoelectric element, liquid discharge head, ultrasonic motor, and dust cleaner

A vibration wave drive device includes an annular piezoelectric element including a piezoelectric material and multiple electrodes provided sandwiching the piezoelectric material, the annular piezoelectric element being configured to vibrate by a traveling wave of a wavelength &#x3bb;; and a power feeding member including at least an electric wire for supplying electric power to the element, the feeding member being provided at a first surface of the element. The element includes at least two driving regions, and a non-driving region arranged between two of the at least two driving regions and having an average annular length of n&#x3bb;/4, n being an odd number. At least one electrode provided on the first surface is arranged across the driving region and the non-driving region, and is electrically connected to the feeding member only in the non-driving region.

Vibration wave drive device, stator for a vibration wave motor, vibration wave motor, driving control system, optical apparatus, and manufacturing method of a vibration wave driving device

The present invention provides a piezoelectric element that includes a piezoelectric material having first and second surfaces; a common electrode disposed on the first surface; and a plurality of drive phase electrodes, a detection phase electrode, and a non-drive phase electrode disposed on the second surface, the piezoelectric material being sandwiched between the common electrode and the electrodes on the second surface. An absolute value d() of a piezoelectric constant of the piezoelectric material () in portions sandwiched between the drive phase electrodes and the common electrode, an absolute value d() of a piezoelectric constant of the piezoelectric material () in a portion sandwiched between the detection phase electrode and the common electrode, and an absolute value d() of the piezoelectric material () in a portion sandwiched between the non-drive phase electrode and the common electrode satisfy d()&#x3c;0.95d(), d()&#x3c;0.95d(), and 0.9&#x2266;d()/d()&#x2266;1.1.

Piezoelectric element, stator for oscillatory wave motor, oscillatory wave motor, driving control system, optical apparatus, and method for making stator for oscillatory wave motor

An oscillatory wave drive device has an oscillatory wave driving unit having an electromechanical energy conversion element having drive phases and a detection phase, a diaphragm, and a rotor, in which a traveling wave is generated on the surface of the diaphragm of the electromechanical energy conversion element to drive the rotor, and the driving speed of the rotor is controlled based on a signal of the phase difference detecting unit. In the oscillatory wave drive device, a detection phase voltage step-down unit and a drive phase voltage step-down unit each containing a resistance voltage dividing circuit having at least two resistors are provided and the voltage dividing ratio in the resistance voltage dividing circuit of the detection phase voltage step-down unit is lower than 1/1 and higher than 1/20.

Oscillatory wave drive device and optical apparatus

Provided are a barium titanate-based piezoelectric ceramics having satisfactory piezoelectric performance and a satisfactory mechanical quality factor (Q), and a piezoelectric element using the same. Specifically provided are a piezoelectric ceramics, including: crystal particles; and a grain boundary between the crystal particles, in which the crystal particles each include barium titanate having a perovskite-type structure and manganese at 0.04% by mass or more and 0.20% by mass or less in terms of a metal with respect to the barium titanate, and the grain boundary includes at least one compound selected from the group consisting of BaTiOand BaTiO, and a piezoelectric element using the same.

Manufacturing method for piezoelectric ceramics

A piezoelectric element having an improved piezoelectric constant is provided, and a liquid discharge head, an ultrasonic motor, and a dust removing device, each of which uses the above piezoelectric element, are also provided. A piezoelectric element at least includes a pair of electrodes and a piezoelectric material provided in contact with the pair of electrodes, the piezoelectric material is formed of an aggregate of crystal grains containing barium titanate as a primary component, and among the crystal grains of the aggregate, crystal grains at least in contact with the electrodes have dislocation layers in the grains. A liquid discharge head, an ultrasonic motor, and a dust removing device each use the above piezoelectric element.

Piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device

A barium titanate piezoelectric ceramic having good piezoelectric properties and mechanical strength and a piezoelectric element that includes the ceramic are provided. A method for making a piezoelectric ceramic includes forming a compact containing barium titanate particles, sintering the compact, and decreasing the temperature of the compact. The sintering includes (A) increasing the temperature of the compact to a temperature range of a shrinking process of the compact; (B) increasing the temperature of the compact to a temperature range of a liquid phase sintering process of the compact; (C) decreasing the temperature of the compact to the temperature range of the shrinking process of the compact; and (D) retaining the third temperature.

Piezoelectric ceramic, method for making same, piezoelectric element, liquid discharge head, ultrasonic motor, and dust cleaner

In a piezoelectric device, a first electrode and a second electrode are disposed to be opposed to each other on plate surfaces of the piezoelectric device, a first electrode plane of the piezoelectric device is fixedly bonded to a plate surface of a vibrating plate, a piezoelectric material forming the piezoelectric device is polarized in a direction parallel to the first electrode plane, the piezoelectric device is fixed to a base through a second electrode plane of the piezoelectric device, and the piezoelectric device generates a thickness-shear vibration with the fixed second electrode plane being a reference plane. The piezoelectric vibration generated by the piezoelectric device generates a flexural vibration in the vibrating plate, to thereby remove dust adhering to a surface of the vibrating plate.

Dust removing device and dust removing method

Provided is a piezoelectric material excellent in piezoelectricity. The piezoelectric material includes a perovskite-type complex oxide represented by the following General Formula (1).A(ZnTi)MO&#x2003;&#x2003;(1)wherein A represents at least one kind of element containing at least a Bi element and selected from a trivalent metal element; M represents at least one kind of element of Fe, Al, Sc, Mn, Y, Ga, and Yb; x represents a numerical value satisfying 0.4&#x2266;x&#x2266;0.6; and y represents a numerical value satisfying 0.1&#x2266;y&#x2266;0.9.

Metal oxide

In a dust removing device including a vibration plate, which includes on its surface an optical effective region B having a substantially right-angled quadrate shape and an outer region A, and a piezoelectric element, when a region positioned in one end portion of the piezoelectric element in a direction along a side O of the piezoelectric element and spanning along the side P over a length b inwards from a line, which is an extension of a side N, N' of the optical effective region B and which intersects the piezoelectric element, is denoted by an near-end zone &#x3c3; of the piezoelectric element, an absolute value of piezoelectric constant of the piezoelectric material in a region not including the near-end zone &#x3c3;, is denoted by d, and an absolute value of the piezoelectric constant in the near-end zone &#x3c3; is denoted by d, relation of d&#x3e;dis satisfied.

Dust removing device, manufacturing method for same, and image pickup apparatus

A dust removal apparatus includes a vibrating plate, a piezoelectric element, a power supply that applies the piezoelectric element with an alternating voltage; and a control circuit that changes a frequency of the alternating voltage, in which the piezoelectric element includes first and second electrodes and a piezoelectric material, a phase transition temperature T from a first crystal phase to a second crystal phase of the piezoelectric material is &#x2212;40&#xb0; C.&#x2266;T&#x2266;85&#xb0; C., the change of the frequency is for repeating a frequency sweep operation from a first frequency to a second frequency, and when a frequency at which an audible vibration is generated during the sweep operation is set as fns, a frequency at which the audible vibration is ended is set as fne, and a changing time from fns to fne during the sweep operation is set as &#x394;tn, &#x394;tn&#x2266;10 ms is satisfied.

Dust removal apparatus and image pickup apparatus

Provided is a lead-free piezoelectric ceramics having enhanced mechanical quality factor (Qm) and mechanical strength. The piezoelectric ceramics, includes at least a first crystal grain and a second crystal grain. The first crystal grain has an average equivalent circle diameter of 2 &#x3bc;m or more and 30 &#x3bc;m or less. The first crystal grain includes a perovskite-type metal oxide represented by the following general formula (1) as a main component, and the second crystal grain includes a perovskite-type metal oxide represented by the following general formula (2) as a main component: (1) xBaTiO-yCaTiO-zCaZrO; and (2) x'BaTiO-y&#x2032;CaTiO-z&#x2032;CaZrO, provided that x, y, z, x&#x2032;, y&#x2032;, and z&#x2032; satisfy x+y+z=1, x&#x2032;+y&#x2032;+z&#x2032;=1, 0&#x2266;x&#x2032;&#x2266;0.15, 0.85&#x2266;y&#x2032;&#x2266;1, 0&#x2266;z&#x2266;0.05, x&#x3e;x&#x2032;, 0&#x3c;y&#x3c;y&#x2032;, and z&#x3e;0.

Piezoelectric ceramics, piezoelectric element, liquid ejection head, ultrasonic motor, and dust removing device

Provided is a dust removing device that can be designed and controlled appropriately and has high dust removal performance even at low temperature, and an imaging device using the dust removing device. In a dust removing device to be set on a base, including a piezoelectric element formed of a piezoelectric material and a pair of opposing electrodes, a vibration member, and a fixation member containing at least a high molecular compound component, a phase transition temperature T from a first ferroelectric crystal phase to a second ferroelectric crystal phase of the piezoelectric material is set to &#x2212;60&#xb0; C.&#x2266;T&#x2266;&#x2212;5&#xb0; C., and whereby, the dust removing device can be designed and controlled appropriately and high dust removal performance can be obtained even at low temperature.

Dust removing device and imaging device

Growing community of inventors

Yokohama, Japan

Toshihiro Ifuku