Fujitsu Corporation

Tokyo Shibaura Denki Kabushiki Kaisha

Toshihiro Abe

Toshio Yonezawa

Satoshi Iyoda

Yoshinobu Hibi

Shigehiro Yoshikawa

Tiharu Kato

Masayuki Naitou

Hatsuo Nakamura

Shigeo Koguchi

A system resource manager of a site management server registers a server domain as a group of servers having a uniform physical wire connection. A software RM of the site management server and a software sub RM of a domain management server install, in cooperation with each other, a software used by a server that belongs to a registered server domain in a storage connected via a SAN, and causes the server to use installed software.

Method, apparatus, and computer product for managing operation

An improved method of forming a photoresist pattern in the photoengraving process. In the photoengraving process, after forming a photoresist layer, a non-photosensitive organic layer containing cyclized polyisoprene rubber as the major constituent is formed thereover. The organic layer is covered with a mask. The photoresist layer is selectively exposed to light through the organic layer. After developing and removing the organic layer, or together with the organic layer, the photoresist layer is developed.

Method for forming resist pattern

Growing community of inventors

Kawasaki, Japan

Toshihiro Abe