Horiba, Ltd.

S-tec Corporation

Mitsubishi Corporation

Horiba Co. Ltd.

Toshihiko Uno

Shigeyuki Akiyama

Hiroyuki Harada

Katsuhiko Tomita

Ichiro Asano

Masahiko Fujiwara

Tsuyoshi Nakanishi

Naohito Shimizu

Masatomo Ishikura

Hiroki Tanabe

Susumu Mimura

Aritoshi Yoneda

Kazuaki Sawada

Fujio Koga

Tetuo Shimizu

A method for providing twenty-four hour maintenance of a measuring instrument by outputting the data from the measuring instrument to a measuring computer, and if maintenance is needed, transmitting the data to a maintenance computer at one of a plurality of servicing centers, judging whether or not that servicing center is capable of performing the maintenance, and if it is not capable of performing the maintenance, selecting another servicing center that is capable of performing the maintenance and transmitting the measuring instrument's data to one of the maintenance computers at that servicing center, which will then perform the maintenance to the measuring instrument.

Method for providing twenty-four hour maintenance of a measuring instrument using a plurality of servicing centers

A detector assembly for detecting a plurality of different properties at the same location at the same time is provided by integrating onto a single semiconductor substrate a first detector unit for measuring a first property and a second detector unit for measuring a second property. The first and second detector units can share, for example, a common element, such as a sensor device that can provide electrical output signals representative of, respectively, the first property and the second property. The common element can include a diaphragm with a pyroelectric element to provide a measurement of temperature and pressure.

Multiple detecting apparatus for physical phenomenon and/or chemical phenomenon

A method of measuring gas component Concentrations of special material gases for semiconductor, and a semiconductor equipment are provided. The method and apparatus can be incorporated in a gas pipe line system in an inline manner, and measure the component and concentration of a gas flowing through a gas pipe line or a gas with which the gas pipe line system is filled, thereby eliminating any erroneous connection. In the method of measuring gas component concentrations of special material gases for semiconductor, as means for attaining the objects, an infrared gas detector is disposed in a gas pipe line between a gas cylinder containing a special material gas for semiconductor and a semiconductor producing section, so that the gas component and concentration are measured in an inline manner. An apparatus for supplying special material gases for semiconductor is also provided. In the apparatus, a monitor for monitoring a gas component, a concentration, a flow rate, and the like is incorporated in a gas pipe line system from a gas cylinder storing room to a semiconductor equipment, so that any accident such-as erroneous connection, erroneous piping, or erroneous exchange is prevented from occurring. As means for attaining the object, a massflow controller is disposed in each of pipe lines connected to a plurality of gas cylinders containing special material gases for semiconductor, and an infrared gas sensor functioning as an inline gas monitor is disposed in a pipe line between a junction point of the pipe lines and the semiconductor equipment. The massflow controllers and the infrared gas detector are connected to a control apparatus for the apparatus for supplying gases for semiconductor, and the respective output signals are checked. The supply of the gases is controlled in accordance with the agreement or disagreement of the signals.

Method of measuring gas component concentrations of special material

An ultraviolet light source is provided on one end of a cell into which a sample gas is introduced. A beam splitter for dividing beams which have been transmitted through the cell into two optical paths is provided on the other end of the cell. A first detector is provided in one optical path, and a second detector is provided in the other optical path. A gas filter filled with a component to be measured is positioned between the detectors and beam splitter so that a concentration of the component to be measured may be obtained on the basis of a difference between the output of the first detector and the product of the output of the second detector and an appointed constant. Influences resulting from components coexisting in the sample gas are reduced. Alternatively, an infrared light source may be provided on one end of a sample cell. A gas filter filled with a gas the same as the gas to be measured is provided at the other end of the sample cell. A reference filter filled with a non-absorbing gas is positioned parallel to the gas filter. A beam splitter and a detector are sequentially disposed downstream from the gas filter, and a mirror is disposed downstream from the reference filter. The mirror is positioned such that beams which passed through the reference filter may be directed to the beam splitter and, subsequently, the detector.

Gas analyzer

A method of using an opto-acoustic apparatus for measuring, in an environment containing extraneous noise, the concentration of a gas in a mixture of gases or of particulates in a gas. The method is constituted by the steps of providing a measuring opto-acoustic cell having gas inlet and gas outlet for receiving and discharging a gas containing a particulate or a mixture of gases containing a gas the concentration of which is to be measured, directing laser rays from a laser ray generating device into the opto-acoustic cell, placing a chopper in the path of the laser rays between the device and the cell and operating the chopper for chopping the laser rays at a frequency corresponding to the resonant frequency of the cell, providing a narrow band microphone having a resonator with a narrow resonance frequency range including the resonant frequency of the cell and sufficiently narrow to exclude unwanted noise signals from the environment in which the cell is located, placing the microphone on the cell for detecting the sound signal generated by changes in the internal pressure of the cell, and determining from the sound signal the concentration of the gas in the mixture of gases or the concentration of the particulates in the gas.

Method of using an opto-acoustic apparatus for measuring concentration

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Kyoto, Japan

Toshihiko Uno