Kyocera Corporation

Sony Corporation

Okutec Co., Ltd.

Toshihiko Uemura

Tsuneo Muchi

Kunihide Shikata

Takeshi Muneishi

Kenichi Nagae

Katsuya Okumura

Masaki Hayashi

Because a sample holderis composed of a plurality of convex partsprovided on a top face of a base substance, and the plurality of convex partsare spherical surfacesformed of a single crystal or amorphous material, frictional wear of the sample at contact parts between a sampleand the convex partsis reduced, thereby making it possible to inhibit particle generation. Further, because a joining layeris formed of a single crystal or amorphous material, there is no defect that particles scattered on the sample holderfill up it, which makes it possible to easily keep it in a clean state by cleaning, and it is possible to effectively reduce reattachment of particles to the sample

Sample holder, sample suction device using the same, and sample processing method

An aluminous sintered product comprising 70 to 96% by weight of an alumina component and 4 to 30% by weight of additives, said additives including at least the one selected from oxides of elements of the Group 5a of periodic table and at least the one selected from oxides of metals of the iron family and oxides of manganese, titanium, calcium, magnesium, chromium and silica, and said aluminous sintered product exhibiting a volume resistivity of from 1.times.10.sup.7 to 1.times.10.sup.13 .OMEGA.-cm over a temperature range of from 25.degree. to 75.degree. C. and an absolute value of the temperature coefficient of volume resistivity of not larger than 1.8%/.degree.C. under the application of high voltages. The sintered product is used as antistatic part such as conveyer arm, handling jig, tweezers for holding wafers and the like that must not be electrostatically charged in an apparatus for producing semiconductors, and as resistance substrate, electrically conducting material, contact, heater, part in vacuum tubes, and part for electron guns in a CRT such as of TVs and the like.

Alumina sintered product

Growing community of inventors

Higashiomi, Japan

Toshihiko Uemura