Nippon Steel Corporation

Toshihiko Sugimoto

Masanori Hashimoto

Satoshi Akamatsu

Fumio Fudanoki

There is provided a stainless steel sheet material, used for a semiconductor manufacturing device, to which it difficult for fine dust to be attached and from the surface of which the attaching dust can be easily washed away. Also, there is provided a method of manufacturing the stainless steel sheet material. A stainless steel sheet material characterized in that: the number of pinholes, the area of each pinhole exceeding 0.25 mm,, in the area of 10 cm,on the surface of a skinpass-rolled stainless steel sheet material is not more than 10; and the average surface roughness Ra on the center line in the direction perpendicular to the rolling direction is not more than 0.15 &mgr;m. A method of manufacturing a stainless steel sheet material comprising the steps of: annealing a stainless steel cold-rolled sheet in a heat-treatment furnace having no support rollers in a temperature region exceeding 600&deg; C. in a reducing atmosphere; and conducting skinpass rolling on the annealed stainless steel sheet material with a water soluble lubricant so that the average surface roughness Ra on the center line in the direction perpendicular to the rolling direction is not more than 0.15 &mgr;m.

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Hikari, Japan

Toshihiko Sugimoto