Shin-etsu Chemical Co., Ltd.

Nihon Shinku Gijutsu Kabushiki Kaisha

Tokyo Electoron Limited

Toshihiko Shindoh

Kazuhiko Urano

Junichi Arami

Nobuo Kawada

Kenji Ishikawa

Takaaki Nagao

Masatoshi Sato

Tetsuo Suzuki

Takeshi Kakegawa

Toshimasa Okamura

The ceramic electrostatic chuck with built-in heater of the present invention is disclosed having electrodes for electrostatic chuck made from an electroconductive ceramic bonded to a surface of a supporting substrate made from an electrically insulating ceramic, a heat generating layer made from an electroconductive ceramic is bonded to the other surface and the side surface and a covering layer made from an electrically insulating ceramic is provided thereon.

Ceramic electrostatic chuck with built-in heater

A silicon oxide depositing source is a mixture of a metallic silicon powder and a silicon dioxide powder. Both the powders are finely divided to a mean particle size of up to 20 .mu.m. They are mixed to give an oxygen to silicon atom ratio between 1.2:1 and 1.7:1. The source is adapted to be evaporated by an electron beam heating technique, allows the power of an electron beam to be increased without a splash phenomenon, and eventually deposits a silicon oxide thin film having transparency and improved barrier properties.

Silicon oxide depositing source and coated film

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Gunma-ken, Japan

Toshihiko Shindoh